Leadframe, method of manufacturing the same, and method of manufacturing a semiconductor device using the same
First Claim
1. A leadframe comprising:
- a base frame including a die-pad demarcated severally to correspond to each semiconductor element to be mounted thereon, and a plurality of leads arranged around the corresponding die-pad;
an adhesive tape attached to said base frame so as to cover one surface side of each die-pad and the plurality of leads arranged around the corresponding die-pad; and
said plurality of leads corresponding to each die-pad extending with a comb shape from the corresponding die-pad to an outward direction, with being separated severally from the die-pad, inside a region to be ultimately divided into a semiconductor device.
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Accused Products
Abstract
A leadframe for use in a leadless package (a semiconductor device) such as a quad flat non-leaded package (QFN) includes a base frame having a die-pad demarcated severally to correspond to each semiconductor element to be mounted thereon and a plurality of leads arranged around the corresponding die-pad, and an adhesive tape attached to the base frame so as to cover one surface side of each die-pad and the plurality of leads arranged around the corresponding die-pad. The plurality of leads corresponding to each die-pad extend with a comb shape from the corresponding die-pad to an outward direction, with being separated severally from the die-pad, inside a region to be ultimately divided into a semiconductor device. The leadframe further includes a plurality of support bars severally linked to each die-pad. The support bars are supported by the adhesive tape, and extend close to a peripheral portion of the region to be ultimately divided into the semiconductor device.
124 Citations
11 Claims
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1. A leadframe comprising:
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a base frame including a die-pad demarcated severally to correspond to each semiconductor element to be mounted thereon, and a plurality of leads arranged around the corresponding die-pad;
an adhesive tape attached to said base frame so as to cover one surface side of each die-pad and the plurality of leads arranged around the corresponding die-pad; and
said plurality of leads corresponding to each die-pad extending with a comb shape from the corresponding die-pad to an outward direction, with being separated severally from the die-pad, inside a region to be ultimately divided into a semiconductor device. - View Dependent Claims (2, 3, 10, 11)
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4. A method of manufacturing a leadframe, comprising the steps of:
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forming a base frame having an arrangement of die-pads provided for respective semiconductor elements to be mounted thereon and a plurality of leads being linked to the corresponding die-pad and extending with a comb shape to an outward direction, by etching or stamping a metal plate;
forming concave portions by half-etching at portions where said plurality of leads are linked to the corresponding die-pad, of one surface of said base frame;
attaching an adhesive tape to a surface of the side on which said concave portions are formed, of said base frame; and
cutting portions where said concave portions are formed, of said plurality of leads. - View Dependent Claims (5, 6)
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7. A method of manufacturing a leadframe, comprising the steps of:
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forming a base frame having an arrangement of die-pads provided for respective semiconductor elements to be mounted thereon and a plurality of leads being linked to the corresponding die-pad and extending with a comb shape to an outward direction, and simultaneously forming concave portions at portions where said plurality of leads are linked to the corresponding die-pad, of one surface of said base frame, by using resists patterned into predetermined shapes on both surfaces of a metal plate and simultaneously etching the both sides of the metal plate;
attaching an adhesive tape to a surface of the side on which said concave portions are formed, of said base frame; and
cutting portions where said concave portions are formed, of said plurality of leads. - View Dependent Claims (8, 9)
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Specification