Eddy current sensor arrays
First Claim
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1. A test circuit comprising:
- a primary winding of parallel conducting segments including at least four extended portions to impose a spatially periodic magnetic field of at least two spatial wavelengths in a test material when driven by an electric current;
a plurality of sense elements for sensing the response to the imposed magnetic field, the sensing area of each sensing element positioned between the extended portions of the primary winding, the plurality of sensing elements being aligned with one another to sense the response at incremental areas along a path parallel to the extended portions of the primary winding, and having separate output connections; and
at least one sensing element is a magnetoresistive sensor.
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Abstract
An apparatus for the nondestructive measurements of materials. Eddy current sensing arrays are described which provide a capability for high resolution imaging of test materials and also a high probabilitity of detection for defects. These arrays incorporate layouts for the sensing elements which take advantage of microfabrication manufacturing capabilities for creating essentially identical sensor arrays, aligning sensing elements in proximity to the drive elements, and laying out conductive pathways that promote cancellation of undesired magnetic flux.
53 Citations
69 Claims
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1. A test circuit comprising:
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a primary winding of parallel conducting segments including at least four extended portions to impose a spatially periodic magnetic field of at least two spatial wavelengths in a test material when driven by an electric current;
a plurality of sense elements for sensing the response to the imposed magnetic field, the sensing area of each sensing element positioned between the extended portions of the primary winding, the plurality of sensing elements being aligned with one another to sense the response at incremental areas along a path parallel to the extended portions of the primary winding, and having separate output connections; and
at least one sensing element is a magnetoresistive sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A test circuit comprising:
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a primary winding of parallel conducting segments having extended portions including at least one central conductor and at least one return conductor positioned on either side of the central conductor to impose a magnetic field in a test material when driven by an electric current;
a plurality of sense elements for sensing the response of the test material to the imposed magnetic field, each sensing element positioned between the extended portions of the primary winding, the sense elements being aligned with one another to sense the response at incremental areas along a path parallel to the extended portions of the primary winding, and having separate output connections. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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42. A test circuit comprising:
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a primary winding loop of conducting segments having a pair of parallel extended portions to impose a magnetic field in a test material when driven by an electric current;
a first plurality of sense elements for sensing the response of the test material to the imposed magnetic field, the sense elements being aligned with one another to sense the response at incremental areas along a path parallel to the extended portions of the primary winding, and having separate output connections. - View Dependent Claims (43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61)
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62. A test circuit comprising:
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two parallel rows of aligned sense elements for scanning across a material under test surface;
a linear conductor segment positioned parallel to and between the sensing element rows for imposing a magnetic field; and
a first row of sensing elements for detecting cracks on a first side of a feature and a second row of sensing elements for detecting cracks on a second side of a feature. - View Dependent Claims (63, 64, 65, 66, 67, 68)
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69. An automated drawing tool for sensors with at least one extended portion and at least one sensing element where the tool takes input information for dimensions and automatically draws the sensor configuration and leads based on predetermined rules for a specific family of sensor designs.
Specification