Microgyroscope with integrated vibratory element

• US 20030074967A1
• Filed: 12/03/2002
• Published: 04/24/2003
• Est. Priority Date: 07/08/1999
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Rodger, Damien C., Gutierrez, Roman C., Tang, Tony K.
• Granted Patent: US 6,758,093 B2
• Time in Patent Office: Days
• US Class Current: 73/504.02
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Abstract

A microgyroscope having a suspended vertical post uses the Coriolis force to detect the rotation rate. The microgyroscope consists of a single vertical post which is the rotation rate sensing element. The vertical post is formed from the same silicon wafers as the rest of the microgyroscope. A first portion of the vertical post and the clover-leaf structure are made from a first silicon wafer. A second portion of the vertical post and the baseplate are made from a second silicon wafer. The two portions are then bonded together to from the clover-leaf gyroscope with an integrated post structure.

Claims

1. A device and/or method substantially as shown and described.