Electrochemical sensor compensated for relative humidity
First Claim
1. An electrochemical gas sensor, comprising:
- a first substrate having a first surface;
a first sensing electrode and a first counter electrode being spaced apart from one another and deposited on said first surface;
a first electrolytic material having a first thickness and being in contact with said first sensing electrode for carrying a flow of ions;
a second substrate having a second surface;
a second sensing electrode and a second counter electrode being spaced apart from one another and deposited on said second surface;
a second electrolytic material having a second thickness and being in contact with said second sensing electrode for carrying a flow of ions; and
said second thickness being greater than said first thickness.
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Accused Products
Abstract
The invention relates to an electrochemical gas sensor having both a reference sensor and an active sensor, whereby each reference and active sensor includes a substrate, a counter electrode deposited on a surface of the substrate, a sensing electrode also deposited on the surface, and an electrolytic material in electrical contact with both electrodes for carrying a flow of ions between them, which measures a concentration of a gas and compensates for relative humidity differences between sample gas and surrounding atmosphere. The sensor also includes a layer of electrolytic material on the sensing electrode of the reference sensor and a film of electrolytic material on the sensing electrode of the active sensor, whereby the layer is thicker than the film. The invention may further include a reference electrode in both the reference and active sensors for improving sensor accuracy and/or repeatability.
5 Citations
16 Claims
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1. An electrochemical gas sensor, comprising:
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a first substrate having a first surface;
a first sensing electrode and a first counter electrode being spaced apart from one another and deposited on said first surface;
a first electrolytic material having a first thickness and being in contact with said first sensing electrode for carrying a flow of ions;
a second substrate having a second surface;
a second sensing electrode and a second counter electrode being spaced apart from one another and deposited on said second surface;
a second electrolytic material having a second thickness and being in contact with said second sensing electrode for carrying a flow of ions; and
said second thickness being greater than said first thickness. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An electrochemical gas sensor, comprising:
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a first substrate having a first surface;
a first sensing electrode and a first counter electrode being spaced apart from one another and deposited on said first surface;
a second substrate having a second surface;
a second sensing electrode and a second counter electrode being spaced apart from one another and deposited on said second surface; and
said first sensing electrode being of a material that is more sensitive to detecting a gas than a material of said second electrode. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. An electrochemical gas sensor comprising:
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a substrate having a surface;
a counter and reference electrode being deposited on said surface;
a first sensing electrode and a second sensing electrode, being spaced apart from one another and from said counter and reference electrode, being deposited on said surface;
a first electrolytic material having a first thickness and being in contact with said first sensing electrode for carrying a flow of ions;
a second electrolytic material having a second thickness and being in contact with said second sensing electrode for carrying a flow of ions; and
said second thickness being greater than said first thickness.
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Specification