Fabrication of on-package and on-chip structure using build-up layer process
First Claim
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1. A process of forming an inductor comprising:
- providing a substrate, wherein the substrate comprises at least one microelectronic device packaged therewith;
forming electrical communication for the at least one microelectronic device, wherein the electrical communication comprises at least two electrically conductive layers;
patterning an inductor on the substrate; and
connecting the inductor to the at least one microelectronic device.
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Abstract
The invention relates to a process of forming an on-chip package inductor. The process includes providing a substrate with at least one microelectronic device packaged therewith. As part of the inventive process, electrical communication is formed for the microelectronic device. The electrical communication includes at least two electrically conductive layers. As part of the inventive technology, the inductor is patterned on the substrate before, during, or after formation of the electrical communication. The inductor is connected to the at least one microelectronic device.
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Citations
30 Claims
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1. A process of forming an inductor comprising:
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providing a substrate, wherein the substrate comprises at least one microelectronic device packaged therewith;
forming electrical communication for the at least one microelectronic device, wherein the electrical communication comprises at least two electrically conductive layers;
patterning an inductor on the substrate; and
connecting the inductor to the at least one microelectronic device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A process of forming an inductor comprising:
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providing a substrate, wherein the substrate comprises at least one microelectronic device packaged therewith;
forming a first dielectric layer on the substrate;
patterning a first seed layer on the substrate;
patterning a first conductive trace on the first seed layer;
forming a second dielectric layer over the first conductive trace;
patterning a second seed layer on the second dielectric layer; and
patterning a second conductive trace over the second seed layer. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A process of forming an inductor comprising:
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providing a substrate, wherein the substrate comprises at least one microelectronic device packaged therewith;
forming electrical communication for the at least one microelectronic device;
forming a first dielectric layer on the substrate;
patterning a first conductive trace over the first dielectric layer;
forming a second dielectric layer over the first conductive trace; and
patterning a second conductive trace over the second conductive trace; and
connecting the inductor to the at least one microelectronic device. - View Dependent Claims (24, 25, 26, 27)
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28. A process of making an inductor package comprising:
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forming an inductor upon a first substrate having an inactive surface;
providing a device comprising an active surface over a second substrate; and
flip-chip connecting the inductor to the device. - View Dependent Claims (29, 30)
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Specification