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Gas delivery apparatus and method for atomic layer deposition

  • US 20030079686A1
  • Filed: 12/21/2001
  • Published: 05/01/2003
  • Est. Priority Date: 10/26/2001
  • Status: Active Grant
First Claim
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1. A gas delivery assembly, comprising:

  • a covering member comprising an expanding channel at a central portion of the covering member and comprising a bottom surface extending from the expanding channel to a peripheral portion of the covering member; and

    one or more gas conduits coupled to the expanding channel, wherein the one or more gas conduits are positioned at an angle from a center of the expanding channel.

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