Microdevice with lever assembly

• US 20030080648A1
• Filed: 09/19/2002
• Published: 05/01/2003
• Est. Priority Date: 11/29/1999
• Status: Active Grant

• Current Assignee: Coherent Inc (Coherent Corp.)
• Original Assignee: Coherent Inc (Coherent Corp.)
• Inventors: Jerman, John H., Grade, John D.
• Granted Patent: US 6,903,486 B2
• Time in Patent Office: Days
• US Class Current: 310/309
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

A balanced microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the movable structure and an opposite second extremity coupled to the element. The movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel. The element is substantially mechanically balanced to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.

Claims

1. A microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot, the lever having a first extremity coupled to the movable structure and an opposite second extremity coupled to the element whereby the movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel and the element is substantially mechanically balanced to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.

2. The microdevice of claim 1 wherein the pivot has an X-shaped configuration and is formed from bendable first and second pivot arms, each of the first and second pivot arms having a first end portion coupled to the substrate and a second end portion coupled to the lever, the first and second pivot arms having respective central portions that are coupled together to form a pivot point about which the lever pivots.

3. The microdevice of claim 2 wherein the lever has a first length from the first extremity to the pivot point and a second length from the second extremity to the pivot point, the ratio of the second length to the first length ranging from two to three.

4. The microdevice of claim 1 further comprising an elongated flexural member for coupling the movable structure to the first extremity of the lever.

5. The microdevice of claim 1 wherein the movable structure includes a comb drive member.

6. The microdevice of claim 5 wherein the comb drive member is a linear comb drive member.

7. The microdevice of claim 1 wherein the element is an optical element.

8. The microdevice of claim 7 wherein the optical element is a light blocking member.

9. The microdevice of claim 1 wherein the element pivots about a pivot axis extending perpendicular to the substrate.

10. The microdevice of claim 1 wherein the element moves in a plane parallel to the plane of the movable structure.

11. A microdevice for use with a laser providing an optical beam comprising a substrate, a light-blocking element, a drive member overlying the substrate and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot, the lever having a first extremity coupled to the drive member and an opposite second extremity coupled to the light-blocking element whereby the drive member causes the lever to pivot about the pivot so as to move the light-blocking element in a direction of travel to block at least a portion of the optical beam and a counterbalance coupled to the light-blocking member for inhibiting undesirable movement of the light-blocking element in the direction of travel in response to externally applied forces.

12. The microdevice of claim 11 wherein the pivot is X-shaped.

13. The microdevice of claim 11 wherein the drive member is a comb drive member.

14. The microdevice of claim 11 wherein the drive member is an electrically-driven drive member.

15. The microdevice of claim 11 wherein the lever pivots about a pivot axis extending perpendicular to the substrate.

16. A microdevice comprising a substrate, a movable element, a drive member overlying the substrate and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot, the lever having a first extremity coupled to the drive member and a second extremity coupled to the element whereby the drive member causes the lever to pivot about the pivot so as to move the element in a direction of travel.

17. The microdevice of claim 16 further comprising a counterbalance coupled to the element for inhibiting undesirable movement of the element in the direction of travel in response to externally applied forces.

18. The microdevice of claim 16 wherein the drive member is a comb drive member.