Method and apparatus using an SLM
First Claim
1. A method for calibrating elements in a spatial light modulator (SLM) as a function of a control signal, comprising the actions of:
- projecting electromagnetic radiation onto elements in at least a part of the SLM;
relaying at least part of said electromagnetic radiation through a spatial filter in a Fourier plane onto a detector arrangement that measures doses of the electromagnetic radiation;
varying at least two of the elements that are non-adjacent through a first sequence of analog control signals while measuring the doses that result; and
computing element response curves from the measured doses.
7 Assignments
0 Petitions
Accused Products
Abstract
An aspect of the present invention includes
The present invention relates to a method for calibrating elements in a spatial light modulator (SLM) as a function of an applied element control signal. A plurality of elements are calibrated simultaneously. A beam of electromagnetic radiation is projected on to at least a part of the SLM. An image of said part of said SLM is formed on a device for measuring intensity of electromagnetic radiation. Element calibrating data is generated by using the intensity data as a function of the applied element control signal by either driving a sub-matrix comprising at least two elements out of said part of the SLM to a sequence of applied element control signals or by seeking out the control signal for each element which give the same predetermined intensity value on the device for measuring the intensity of electromagnetic radiation and stepping through N different predetermined intensity values. The invention also relates to an apparatus for patterning a workpiece having such a calibration method. Other aspects of the present invention are reflected in the detailed description, figures and claims.
-
Citations
42 Claims
-
1. A method for calibrating elements in a spatial light modulator (SLM) as a function of a control signal, comprising the actions of:
-
projecting electromagnetic radiation onto elements in at least a part of the SLM;
relaying at least part of said electromagnetic radiation through a spatial filter in a Fourier plane onto a detector arrangement that measures doses of the electromagnetic radiation;
varying at least two of the elements that are non-adjacent through a first sequence of analog control signals while measuring the doses that result; and
computing element response curves from the measured doses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
-
-
22. A method for calibrating multi-value elements in a Spatial Light Modulator (SLM), comprising the actions of:
-
mapping elements of an SLM to corresponding elements of a detector arrangement;
repeating the steps of;
setting multi-value control signals for a set of the SLM elements to produce a target dose;
relaying electromagnetic radiation from the set of SLM elements through a spatial filter in a Fourier plane onto a detector arrangement to measure doses of the electromagnetic radiation;
adjusting the multi-value control signals for the set of the SLM elements corresponding to an individuated difference between the measured doses and the target dose at the detector arrangement; and
terminating the repetition when the difference between the measured dose and the target dose satisfies a predetermined criteria. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
-
-
35. A method for calibrating phase-modulated elements in a Spatial Light Modulator (SLM), comprising the actions of:
-
mapping the elements of the SLM to corresponding elements of a detector arrangement;
repeating the steps of;
setting phase-modulation control signals for a set of the SLM elements to produce a target dose;
relaying electromagnetic radiation from the set of the SLM elements through a filter that transforms phase-modulated radiation into amplitude-modulated radiation and onto a detector arrangement to measure doses of the electromagnetic radiation;
adjusting the phase-modulation control signals for the set of the SLM elements corresponding to an individuated difference between the measured doses and the target dose at the detector arrangement; and
terminating the repetition when the difference between the measured dose and the target dose satisfies a predetermined criteria. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42)
-
Specification