Vibration-type micro-gyroscope
First Claim
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1. A vibratory micromachined gyroscope comprising:
- an inner drive gimbals of a planar gimbals structure; and
an outer sensor gimbals of a planar gimbals structure, wherein the vibratory micromachined gyroscope is operated by way of an electrostatic drive and a capacitance variation sensor.
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Abstract
The present invention is for a vibration-type micro-gyroscope. The micro-gyroscope according to the present invention has an inner driving gimble and an outer detecting gimble. The inner gimble is driven by electrostatic force and the outer gimble detects variance of capacitance induced by angular velocity. The outer gimble is connected to a fixing axis through a first plate-spring and the inner gimble is connected to the outer gimble through a second plate-spring.
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13 Claims
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1. A vibratory micromachined gyroscope comprising:
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an inner drive gimbals of a planar gimbals structure; and
an outer sensor gimbals of a planar gimbals structure, wherein the vibratory micromachined gyroscope is operated by way of an electrostatic drive and a capacitance variation sensor. - View Dependent Claims (2)
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3. A vibratory micromachined gyroscope comprising:
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a drive gimbals for vibrating a whole gimbals structure in a first direction;
a sensor gimbals moving in a second direction perpendicular to the first direction when an angular rate is applied;
a driven mode flexure connecting the drive gimbals with a fixed anchor and moving in the first direction; and
a sensor mode flexure connecting the drive gimbals and the sensor gimbals and moving in the second direction. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification