Spacers for field emission displays
First Claim
Patent Images
1. A method of forming a field emission display, comprising:
- forming a cathode, the cathode including a plurality of emitters;
forming a plurality of posts over the cathode, the posts comprising a photoresist material;
coating the posts with a coating material, the coating material forming sidewalls around the posts;
removing the photoresist material from within the sidewalls;
forming an anode and spacing the anode apart from the cathode, the sidewalls extending from the cathode to the anode.
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Abstract
The disclosed method for forming a field emission display includes forming a cathode and an anode, forming a plurality of photoresist posts over the cathode, and coating the posts with a coating material. The coating material forms sidewalls around the posts. The photoresist posts may then be removed from within the sidewalls. The anode may then be fitted onto the sidewalls so that the sidewalls function as spacers in the field emission display.
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Citations
54 Claims
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1. A method of forming a field emission display, comprising:
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forming a cathode, the cathode including a plurality of emitters;
forming a plurality of posts over the cathode, the posts comprising a photoresist material;
coating the posts with a coating material, the coating material forming sidewalls around the posts;
removing the photoresist material from within the sidewalls;
forming an anode and spacing the anode apart from the cathode, the sidewalls extending from the cathode to the anode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of forming a field emission display, comprising:
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forming a cathode, the cathode including a plurality of emitters;
forming a plurality of posts over the cathode, the posts comprising a photoresist material;
coating the posts with a coating material, each post and the coating material that coats that post forming a column;
forming an anode and spacing the anode apart from the cathode, the columns extending from the cathode to the anode. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A method of forming a field emission display, comprising:
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forming a cathode, the cathode including a plurality of emitters;
forming a plurality of posts over the cathode, the posts comprising a photoresist material;
exposing the posts to an atmosphere comprising silicon;
exposing the posts to reactive oxygen;
forming an anode and spacing the anode apart from the cathode, the posts extending from the cathode to the anode. - View Dependent Claims (29, 30, 31, 32, 33)
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34. A method of forming a field emission display, comprising:
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forming an insulating layer over a substrate, the insulating layer defining a plurality of void regions;
forming a conductive grid layer over the insulating layer, the conductive grid layer defining a plurality of apertures, each one of the apertures corresponding to one of the void regions and each aperture overlying its corresponding void region;
forming a plurality of emitters over the substrate, each one of the emitters corresponding to one of the void regions and one of the apertures, each emitter being disposed within its corresponding void region;
forming a plurality of posts over the grid layer, the posts comprising a photoresist material;
coating the posts with a coating material, the coating material forming sidewalls around the posts;
removing the photoresist material from within the sidewalls;
disposing a faceplate opposite the grid layer, the sidewalls extending from the grid layer to the faceplate.
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35. A method of forming a field emission display, comprising:
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forming an insulating layer over a substrate, the insulating layer defining a plurality of void regions;
forming a conductive grid layer over the insulating layer, the conductive grid layer defining a plurality of apertures, each one of the apertures corresponding to one of the void regions and each aperture overlying its corresponding void region;
forming a plurality of emitters over the substrate, each one of the emitters corresponding to one of the void regions and one of the apertures, each emitter being disposed within its corresponding void region;
forming a plurality of posts over the grid layer, the posts comprising a photoresist material;
coating the posts with a coating material, each post and the coating material that coats that post forming a column;
disposing a faceplate opposite the grid layer, the columns extending from the grid layer to the faceplate.
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36. A method of forming a field emission display, comprising:
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forming an insulating layer over a substrate, the insulating layer defining a plurality of void regions;
forming a conductive grid layer over the insulating layer, the conductive grid layer defining a plurality of apertures, each one of the apertures corresponding to one of the void regions and each aperture overlying its corresponding void region;
forming a plurality of emitters over the substrate, each one of the emitters corresponding to one of the void regions and one of the apertures, each emitter being disposed within its corresponding void region;
forming a plurality of posts over the grid layer, the posts comprising a photoresist material;
exposing the posts to an atmosphere comprising silicon;
exposing the posts to reactive oxygen;
disposing a faceplate opposite the grid layer, the posts extending from the grid layer to the faceplate.
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37. A method of forming a spacer for use in a field emission display, comprising:
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forming a plurality of posts over a substrate, the posts comprising a photoresist material;
coating the posts with a coating material, the coating material forming sidewalls around the posts;
removing the photoresist material from within the sidewalls. - View Dependent Claims (38, 39, 40)
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41. A method of forming a spacer for use in a field emission display, comprising:
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forming a plurality of posts over a substrate, the posts comprising a photoresist material;
coating the posts with a coating material, each post and the coating material that coats that post forming a column. - View Dependent Claims (42, 43, 44)
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45. A method of forming a spacer for use in a field emission display, comprising:
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forming a plurality of posts over a substrate, the posts comprising a photoresist material;
exposing the posts to an atmosphere comprising silicon;
exposing the posts to reactive oxygen. - View Dependent Claims (46)
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47. A field emission display comprising:
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a cathode comprising a plurality of emitters;
an anode spaced apart from the cathode;
a plurality of spacers, the spacers extending from the cathode to the anode, each of the spacers being formed in the shape of a hollow tube. - View Dependent Claims (48, 49, 50)
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51. A field emission display comprising:
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a cathode comprising a plurality of emitters;
an anode spaced apart from the cathode;
a plurality of spacers, the spacers extending from the cathode to the anode, each of the spacers comprising a post and a sidewall, the posts being formed from a photoresist material, each sidewall coating at least part of one of the posts. - View Dependent Claims (52, 53, 54)
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Specification