Nanoscale wires and related devices
First Claim
1. An article comprising a free-standing and bulk-doped semiconductor comprising at least one portion having a smallest width of less than 500 nanometers.
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Abstract
The present invention relates generally to sub-microelectronic circuitry, and more particularly to nanometer-scale articles, including nanoscale wires which can be selectively doped at various locations and at various levels. In some cases, the articles may be single crystals. The nanoscale wires can be doped, for example, differentially along their length, or radially, and either in terms of identity of dopant, concentration of dopant, or both. This may be used to provide both n-type and p-type conductivity in a single item, or in different items in close proximity to each other, such as in a crossbar array. The fabrication and growth of such articles is described, and the arrangement of such articles to fabricate electronic, optoelectronic, or spintronic devices and components. For example, semiconductor materials can be doped to form n-type and p-type semiconductor regions for making a variety of devices such as field effect transistors, bipolar transistors, complementary inverters, tunnel diodes, light emitting diodes, sensors, and the like.
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Citations
709 Claims
- 1. An article comprising a free-standing and bulk-doped semiconductor comprising at least one portion having a smallest width of less than 500 nanometers.
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131. An elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers.
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132. A method comprising:
(A) doping a semiconductor during growth of the semiconductor. - View Dependent Claims (133, 134, 135, 136, 137, 138, 139, 140, 141, 142, 143, 144, 145, 146, 147, 148, 149, 150, 151, 152, 153, 154, 155, 156, 157, 158, 159, 160, 161, 162, 163, 164, 165, 688, 689, 690, 691, 692, 693, 694, 695)
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166. A device comprising:
a semiconductor comprising a longitudinal axis, at least two regions differing in composition along the longitudinal axis, and a boundary between the regions, the semiconductor having a maximum dimension at the boundary of no more than about 100 nm. - View Dependent Claims (167, 168, 169, 170, 171, 172, 173, 174, 175, 176, 177, 178, 179, 180, 181, 182, 183, 184, 185, 186, 187, 188, 189, 190, 191, 192)
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193. A device, comprising:
a free-standing wire comprising a first region having a composition and a second region having a composition different from the composition of the first region, wherein the first region has a smallest dimension that is less than about 100 nm and the second region has a smallest dimension that is less than about 100 nm. - View Dependent Claims (194, 195, 196, 197)
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198. A device, comprising:
a free-standing bulk-doped nanoscopic material having a first region having a composition and a second region having a composition different from the composition of the first region, wherein at least one of the first region and the second region has an aspect ratio of at least about 100;
1.
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199. A device, comprising:
a free-standing bulk-doped semiconductor comprising a first region having a composition and a second region having a composition different from the composition of the first region, wherein at least one of the first and second region has a maximum dimension of less than about 100 nm.
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200. A device, comprising:
a free-standing wire comprising a first region having a dopant and a second region having a dopant different from the dopant of the first region, the first region and the second region overlapping to form an overlap region having a composition that is a mixture of the dopants of the first and second regions, the composition of the overlap region comprising between about 10 vol % and about 90 vol % of the dopant of the first region with a complementary amount of the dopant of the second region, wherein the overlap region has a maximum dimension of less than about 100 nm.
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201. A device, comprising:
a free-standing nanoscopic wire comprising a first region comprising a dopant at a first concentration and a second region comprising the dopant at a second concentration, wherein the second concentration is different from the first concentration.
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202. A device, comprising:
a free-standing nanoscopic wire comprising a first semiconductor and a second semiconductor, at least one of the first semiconductor and the second semiconductor being a doped semiconductor, wherein a composition of the first semiconductor and a composition of the second semiconductor are different.
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203. A device, comprising:
a free-standing nanoscopic wire comprising a first region having a first concentration of a semiconductor material and a second region having a second concentration of the semiconductor material, wherein the first concentration and the second concentration are different.
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204. A device, comprising:
a free-standing nanoscopic wire comprising a first region having a first resistivity and a second region having a second resistivity different from the first resistivity.
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205. A device, comprising:
a free-standing nanoscopic wire comprising a first region having a first band gap and a second region having a second band gap different from the first band gap.
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206. A device, comprising:
a free-standing photoluminescent nanoscopic wire.
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207. A device, comprising:
free-standing nanoscopic wire able to produce polarized light.
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208. A device, comprising:
a nanoscopic wire able to produce light having a polarization ratio of at least about 0.60. - View Dependent Claims (209, 210, 211)
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212. A device, comprising:
a photodetector having a responsivity of at least about 3000 A/W.
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213. A device, comprising:
a photodetector having a detection speed of less than about 100 fs. - View Dependent Claims (214)
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215. A device, comprising:
a nanoscopic wire comprising a first region having a composition and a second region having a composition different from the first region, the first region and the second region overlapping to form an overlap region having a composition that is a mixture of the compositions of the first and second regions, the composition of the overlap region comprising between about 10 vol % and about 90 vol % of the composition of the first region with a complementary amount of the composition of the second region, wherein the overlap region is able to emit light. - View Dependent Claims (216)
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217. A device, comprising:
a free-standing nanoscopic wire comprising a plurality of light-emitting regions.
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218. A method, comprising:
growing a nanoscale semiconductor having a plurality of regions able to produce light.
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219. A device, comprising:
a light-emitting diode comprising a nanoscale wire comprising a first region having a dopant and a second region having a dopant different from the dopant of the first region, the first region and the second region overlapping to form an overlap region having a composition that is a mixture of the dopants of the first and second regions, the composition of the overlap region comprising between about 10 vol % and about 90 vol % of the dopant of the first region with a complementary amount of the dopant of the second region, wherein the light-emitting diode has an emission wavelength determined by a dimension of the overlap region.
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220. A device, comprising:
a nanoscale wire comprising a first region having a dopant and a second region having a dopant different from the dopant of the first region, the first region and the second region overlapping to form an overlap region having a composition that is a mixture of the dopants of the first and second regions, the composition of the overlap region comprising between about 10 vol % and about 90 vol % of the dopant of the first region with a complementary amount of the dopant of the second region.
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221. A device, comprising:
a wire comprising a semiconductor, wherein the wire is able to emit light at a higher frequency than the semiconductor in a bulk state.
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222. A device, comprising:
a uniformly photoluminescent nanoscopic wire.
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223. An article comprising:
a nanoscopic wire and a functional moiety positioned relative to the nanoscopic wire such that an interaction involving the moiety causes a detectable change in a property of the nanoscopic wire. - View Dependent Claims (224, 225, 226, 227, 228, 229, 230, 231, 232, 233, 234, 235, 236, 237, 238, 239, 240, 241, 242, 243, 244)
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245. An article comprising:
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a sample exposure region; and
a nanoscopic wire, at least a portion of which is addressable by a sample in the sample exposure region. - View Dependent Claims (246, 247, 248, 249, 250, 251, 252, 253, 254, 255, 256, 257, 258, 259, 268, 269, 270, 271, 272, 273, 274, 275, 276, 277, 278, 279, 280, 281, 282, 283, 284, 285, 286, 287, 288, 289, 290, 291, 292, 293, 294, 295, 296, 297, 298, 299, 300, 301, 302, 303, 304, 305, 306, 307, 308, 309, 310, 311, 312, 313, 314, 315, 316, 317, 318, 319, 320, 321, 322)
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323. A method comprising:
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contacting a nanoscopic wire with a sample suspected of containing an analyte; and
determining a change in a property of the nanoscopic wire. - View Dependent Claims (324, 325, 326, 327, 328, 329, 330, 331, 332, 333, 334, 335, 336, 337, 338, 339, 340, 341, 342, 343, 344, 345)
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346. A method comprising:
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contacting a nanoscopic wire with a sample having a volume of less than about 10 microliters; and
measuring a change in a property of the nanoscopic resultant from the contact.
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347. A method comprising:
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contacting a nanoscopic wire with a sample suspected of containing an analyte; and
determining the presence or quantity of the analyte by measuring a change in a property of the nanoscopic wire resulting from the contact, wherein less than ten molecules of the analyte contribute to the change in the property detected. - View Dependent Claims (348, 349)
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350. A method of detecting an analyte, comprising:
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contacting a nanoscopic wire with a sample; and
determining a property associated with the nanoscopic wire where a change in the property when the nanoscopic wire is contacted with the sample indicates the presence or quantity of the analyte in the sample.
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351. A method comprising:
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contacting an electrical conductor with a sample; and
determining the presence or quantity of an analyte in the sample by measuring a change in a property of the conductor resultant from the contact, wherein less than ten molecules of the analyte contribute to the a change in said property.
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352. A device, comprising:
an article formed of a bulk-doped semiconductor material, the article able to emit light at a frequency lower than the frequency of light emission inherent to the bulk-doped semiconductor material. - View Dependent Claims (353, 354, 355, 356, 357, 358, 359, 360, 361, 362, 363, 364, 365, 366, 367, 368, 369, 370, 371, 372, 373, 374)
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375. A method comprising:
causing the emission of light from a semiconductor wire at a frequency lower than 700 nm. - View Dependent Claims (376, 377, 378, 379, 380, 381, 382, 383, 384, 385, 386, 387, 388, 389, 390, 391)
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392. A device comprising:
a memory element comprising a memory active element having a volume of less than 314 μ
m3, the active element switchable electronically between a first readable state and a second readable state electronically distinguishable from the first readable state.
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393. A device, comprising:
a transistor having a smallest dimension that is less than about 100 nm. - View Dependent Claims (394, 395, 396, 397, 398, 399, 400, 401, 402, 403, 404, 405, 406, 407)
- 408. A doped semiconductor comprising a single crystal.
- 417. An article comprising a doped semiconductor, at least a portion of which is made by the method of doping the semiconductor during growth of the semiconductor.
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432. A sensor comprising:
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at least one nanoscale wire; and
means for measuring a change in a property of the at least one nanoscale wire. - View Dependent Claims (433, 434, 435, 436, 437, 438, 439, 440, 441, 442, 443, 444, 445, 446, 447, 448, 449)
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450. A bulk-doped semiconductor that is at least one of the following:
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, wherein a phenomena produced by a section of the bulk-doped semiconductor exhibits a quantum confinement caused by a dimension of the section.
- View Dependent Claims (451, 452, 453, 454, 455, 456, 457, 458)
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459. A bulk-doped semiconductor that exhibits coherent transport.
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460. A bulk-doped semiconductor that exhibits ballistic transport.
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461. A bulk-doped semiconductor that exhibits Luttinger liquid behavior.
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462. A solution comprising one or more doped semiconductors, wherein at least one of the semiconductors is at least one of the following:
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers.
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463. A device comprising at least one doped semiconductor, wherein the at least one doped semiconductor is at least one of the following:
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers.
- View Dependent Claims (464, 465, 466, 467, 468, 469, 470, 471, 472, 473, 474, 475, 476, 477, 478, 479, 480, 481, 482, 483, 484, 485, 486, 487, 488, 489, 490, 491, 492, 493, 494, 495, 496, 497, 498, 499, 500, 501, 502, 503, 504, 505, 506, 507, 508, 509, 510, 511, 512, 513, 514, 515, 516, 517, 518, 519, 520, 521, 522, 523, 524, 525, 526, 527, 528, 529, 530, 531, 532, 533, 534, 535, 536, 537, 538, 539, 540, 541, 542, 543, 544, 545, 546, 547, 548, 549, 551, 552, 553, 554)
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555. A collection of reagents for growing a doped semiconductor that will be at least one of the following:
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers that comprises at least one portion having a smallest width of less than 500 nanometers,
wherein the collection comprises a semiconductor reagent and a dopant reagent.
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers that comprises at least one portion having a smallest width of less than 500 nanometers,
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556. A method of fabricating a device, comprising:
(A) contacting one or more semiconductors to a surface, wherein at least one of the semiconductors is at least one of the following;
a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers.- View Dependent Claims (557, 558, 559, 560, 561, 562, 563, 564, 565, 566, 567)
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568. A method of generating light, comprising:
(A) applying energy to one or more semiconductors causing the one or more semiconductors to emit light, wherein at least one of the semiconductors is at least one of the following;
a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers.- View Dependent Claims (569, 570, 571, 572, 573, 574)
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575. A method of assembling one or more elongated structures on a surface, wherein one or more of the elongated structures are at least one of the following:
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the method comprises acts of;
(A) conditioning the surface with one or more functionalities that attract the one or more elongated structures to particular positions on the surface, and (B) aligning the one or more elongated structures by attracting the one or more elongated structures to the particular positions using the one or more functionalities. - View Dependent Claims (550, 576, 577, 578, 579, 580, 581, 582, 583)
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the method comprises acts of;
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584. A method of assembling a plurality of elongated structures on a surface, wherein one or more of the elongated structures are at least one of the following:
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the method comprises acts of;
(A) depositing the plurality of elongated structures onto the surface; and
(B) electrically charging the surface to produce electrostatic forces between two or more of the plurality of the elongated structures. - View Dependent Claims (585, 586, 587)
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the method comprises acts of;
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588. A method of assembling a plurality of elongated structures on a surface, wherein one or more of the elongated structures are at least one of the following:
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the method comprises acts of;
(A) dispersing the one or more elongated structures on a surface of a liquid phase to form a Langmuir-Blodgett film;
(B) compressing the Langmuir-Blodgett film; and
(C) transferring the compressed Langmuir-Blodgett film onto a surface - View Dependent Claims (589)
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the method comprises acts of;
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590. A method of assembling a plurality of one or more elongated structures on a surface, wherein at least one of the elongated structures are at least one of the following:
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the method comprises acts of;
(A) dispersing the one or more elongated structures in a flexible matrix;
(B) stretching the flexible matrix in a direction to produce a shear force on the one or more elongated structures that causes the at least one elongated structure to align in the direction;
(C) removing the flexible matrix; and
(D) transferring the at least one aligned elongated structure to a surface. - View Dependent Claims (591, 592, 593, 594, 595, 596, 597)
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the method comprises acts of;
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598. A system for growing a doped semiconductor, the system comprising:
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means for providing a molecules of the semiconductor and molecules of a dopant; and
means for doping the molecules of the semiconductor with the molecules of the dopant during growth of the semiconductor to produce the doped semiconductor.
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599. A system for assembling one or more elongated structures on a surface, the system comprising:
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means for flowing a fluid that comprises the one or more elongated structures onto the surface; and
means for aligning the one or more elongated structures on the surface to form an array of the elongated structures.
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600. A system for assembling one or more elongated structures on a surface, wherein one or more of the elongated structures are at least one of the following:
- is at least one of the following;
a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the system comprises;
means for conditioning the surface with one or more functionalities that attract the one or more elongated structures to particular positions on the surface, and means for aligning the one or more elongated structures by attracting the one or more elongated structures to the particular positions using the one or more functionalities.
- is at least one of the following;
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601. A system for assembling a plurality of elongated structures on a surface, wherein one or more of the elongated structures are at least one of the following:
- is at least one of the following;
a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the system comprisesmeans for depositing the plurality of elongated structures onto the surface; and
means for electrically charging the surface to produce electrostatic forces between two or more of the plurality of the elongated structures.
- is at least one of the following;
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602. A system for assembling a plurality of elongated structures on a surface, wherein one or more of the elongated structures are at least one of the following:
- is at least one of the following;
a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the system comprises;
means for dispersing the one or more elongated structures on a surface of a liquid phase to form a Langmuir-Blodgett film;
means for compressing the Langmuir-Blodgett film; and
means for transferring the compressed Langmuir-Blodgett film onto a surface
- is at least one of the following;
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603. A system for assembling a plurality of one or more elongated structures on a surface, wherein at least one of the elongated structures are at least one of the following:
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the system comprises;
means for dispersing the one or more elongated structures in a flexible matrix;
means for stretching the flexible matrix in a direction to produce a shear force on the one or more elongated structures that causes the at least one elongated structure to align in the direction;
means for removing the flexible matrix; and
means for transferring the at least one aligned elongated structure to a surface.
- a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers, and wherein the system comprises;
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604. An article comprising:
a sample cassette comprising a sample exposure region and a nanowire, at least a portion of which is addressable by a sample in the sample exposure region, wherein the sample cassette is operatively connectable to a detector apparatus able to determine a property associated with the nanowire.
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605. A nanowire sensor device, comprising
a semiconductor nanowire having a first end in electrical contact with a conductor to form a source electrode, a second end in electrical contact with a conductor to form a drain electrode, and an exterior surface having an oxide formed thereon to form a gate electrode, and a binding agent having specificity for a selected moiety and being bound to the exterior surface, whereby a voltage at the gate electrode varies in response to the binding of the moiety to the binding agent to provide a chemically gated field effect sensor device.
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606. A analyte-gated field effect transistor having a predetermined current-voltage characteristic and adapted for use as a chemical or biological sensor, comprising:
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(a) a substrate formed of a first insulating material;
(b) a source electrode disposed on the substrate;
(c) a drain electrode disposed on the substrate, (d) a semiconductor nanowire disposed between the source and drain electrodes to form a field effect transistor having a predetermined current-voltage characteristic; and
(e) an analyte-specific binding agent disposed on a surface of the nanowire, wherein a binding event occurring between a target analyte and the binding agent causes a detectable change in the current-voltage characteristic of said field effect transistor. - View Dependent Claims (607, 608, 609, 610, 611, 612, 613, 614)
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615. A field effect transistor comprising:
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a conducting channel comprising a doped semiconductor having at least one portion having a smallest width of less then 500 nanometers; and
a gate electrode comprising an elongated material having at least one portion having a smallest width of less then 500 nanometers. - View Dependent Claims (616, 617, 618, 619, 620, 621, 622, 623)
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- 624. A logic gate, comprising a doped semiconductor having a smallest width of less than 500 nanometers.
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634. A method of using a semiconductor, comprising:
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providing a free-standing nanoscale semiconductor comprising a first region having a composition and a second region having a composition different from the composition of the first region; and
allowing an electrical current to flow through the doped semiconductor.
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635. A method comprising:
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exposing a conductor to a source of electromagnetic radiation; and
changing the electrical conductivity of the conductor by altering polarity of the electromagnetic radiation in the absence of a grating between the source and the conductor.
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636. A nanowire device including a semiconductor nanowire disposed proximate to an inductive material capable of establishing a field in the nanowire, which inductive material has at least two different electronic or mechanical states which able to differentially affect a property of the nanowire.
- 637. A device including a semiconductor disposed proximate to an inductive material capable of establishing a field in the semiconductor, the inductive material having at least two different states able to differentially affect a property of the semiconductor.
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654. A semiconductor nanowire device, comprising:
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a doped channel; and
an inductive material having at least two different electronic or mechanical states and being disposed proximate to the doped channel for inducing a field within the doped channel for effecting a flow of carriers.
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655. A device, comprising:
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a doped semiconductor; and
an inductive material having at least two different states, the inductive material being disposed proximate to the doped semiconductor. - View Dependent Claims (656, 657, 658, 659, 660, 661, 662, 663, 664, 665, 666, 667, 668, 669, 670)
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671. A semiconductor nanowire device, comprising:
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a doped channel; and
an inductive material having at least two different electronic or mechanical states and being disposed proximate to the doped channel for inducing a field within the doped channel for affecting a flow of carriers.
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672. A device, comprising:
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a doped semiconductor; and
an inductive material having at least two different states, the inductive material being positioned so as to be able to affect a flow of carriers within the doped semiconductor. - View Dependent Claims (673, 674, 675, 676, 677, 678, 679, 680, 681, 682, 683, 684, 685)
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696. A method, comprising:
growing a nanoscale wire having at least one shell from a nanoparticle. - View Dependent Claims (697, 698, 699, 700, 701, 702, 703, 704, 705, 706, 707, 708, 709)
Specification