Semiconductor device and method for fabricating the same
First Claim
1. A method for fabricating a semiconductor device having a semiconductor layer formed by epitaxial growth from a single-crystal substrate, the method comprising the steps of:
- (a) forming a spacer layer having an optical band gap smaller than an optical band gap of a lowermost portion of the semiconductor layer such that an upper surface of the single-crystal substrate is covered with the spacer layer;
(b) forming the semiconductor layer on the spacer layer; and
(c) irradiating the spacer layer with a light beam having an energy smaller than an optical band gap of the single-crystal substrate and larger than the optical band gap of the spacer layer through a back surface of the single-crystal substrate to separate the semiconductor layer from the single-crystal substrate.
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Accused Products
Abstract
A spacer layer is formed on a single-crystal substrate and an epitaxially grown layer composed of a group III-V compound semiconductor layer containing a nitride or the like is further formed on the spacer layer. The epitaxially grown layer is adhered to a recipient substrate. The back surface of the single-crystal substrate is irradiated with a light beam such as a laser beam or a bright line spectrum from a mercury vapor lamp such that the epitaxially grown layer and the single-crystal substrate are separated from each other. Since the forbidden band of the spacer layer is smaller than that of the single-crystal substrate, it is possible to separate the thin semiconductor layer from the substrate by decomposing or fusing the spacer layer, while suppressing the occurrence of a crystal defect or a crack in the epitaxially grown layer.
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Citations
34 Claims
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1. A method for fabricating a semiconductor device having a semiconductor layer formed by epitaxial growth from a single-crystal substrate, the method comprising the steps of:
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(a) forming a spacer layer having an optical band gap smaller than an optical band gap of a lowermost portion of the semiconductor layer such that an upper surface of the single-crystal substrate is covered with the spacer layer;
(b) forming the semiconductor layer on the spacer layer; and
(c) irradiating the spacer layer with a light beam having an energy smaller than an optical band gap of the single-crystal substrate and larger than the optical band gap of the spacer layer through a back surface of the single-crystal substrate to separate the semiconductor layer from the single-crystal substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A method for fabricating a semiconductor device, the method comprising the steps of:
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(a) forming an AlN buffer layer having a thickness of 0.5 μ
m or more on an single-crystal substrate;
(b) forming a semiconductor layer covering the AlN buffer layer and having a lowermost portion composed of an AlyGa1−
yN layer (0≦
y≦
1); and
(c) irradiating the semiconductor layer with a light beam having an energy smaller than an optical band gap of the AlN buffer layer and larger than an optical band gap of the lowermost portion of the semiconductor layer through a back surface of the single-crystal layer to separate the semiconductor layer from the single-crystal substrate.
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29. A method for fabricating a semiconductor device having a semiconductor layer formed by epitaxial growth from a single-crystal substrate, the method comprising the steps of:
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(a) forming a multilayer portion for preventing extension of a defect such that an upper surface of the single-crystal substrate is covered therewith, the multilayer portion being composed of a plurality of thin films stacked in layers to have gradually varying compositions; and
(b) forming the semiconductor layer on the multilayer portion. - View Dependent Claims (30, 31, 32)
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33. A semiconductor device comprising:
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a substrate;
a semiconductor layer provided on the substrate and including an active layer serving as a light-emitting region; and
a multiple quantum well layer provided on the semiconductor layer and composed of quantum well layers and barrier layers which are alternately stacked. - View Dependent Claims (34)
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Specification