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Semiconductor film, semiconductor device, and method of manufacturing the same

  • US 20030089909A1
  • Filed: 10/08/2002
  • Published: 05/15/2003
  • Est. Priority Date: 10/09/2001
  • Status: Active Grant
First Claim
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1. A semiconductor film, a surface of said semiconductor film having an irregular mesh pattern, wherein:

  • ridges having convex portions that extend out in a ridge shape diverge; and

    at least one pathway that is not obstructed by the ridges is provided between two arbitrary points in a region containing level portions and concave portions sandwiched irregularly by the ridges.

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