Semiconductor device with inductive component and method of making
First Claim
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1. An integrated circuit, comprising:
- a semiconductor substrate having a dielectric region formed with a trench and an adjacent cavity; and
a conductive material disposed within the trench to produce an inductance.
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Abstract
An integrated circuit (10) includes a semiconductor substrate (11) that has a top surface (32) for forming a dielectric region (14) with a trench (40) and one or more adjacent cavities (16). A conductive material such as copper is disposed within the trench to produce an inductor (50). A top surface (49) of the inductor is substantially coplanar with an interconnect surface (31) of the semiconductor substrate, which facilitates connecting to the inductor with standard integrated circuit metallization (57).
3 Citations
36 Claims
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1. An integrated circuit, comprising:
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a semiconductor substrate having a dielectric region formed with a trench and an adjacent cavity; and
a conductive material disposed within the trench to produce an inductance. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of making an integrated circuit, comprising the steps of:
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forming a dielectric region in a semiconductor substrate to have a cavity and a trench; and
disposing a conductive material within the trench to produce an inductance. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of making an integrated circuit, comprising the steps of:
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forming a dielectric region in a semiconductor substrate, where the dielectric region has a cavity;
etching the dielectric region to form a trench adjacent to the cavity; and
disposing a conductive material in the trench to form an inductor. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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28. A semiconductor device, comprising:
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a semiconductor substrate having a dielectric region formed with a cavity;
a first inductor formed within a trench defined by the dielectric region; and
a second inductor overlying the first inductor. - View Dependent Claims (29, 30, 31, 32, 33)
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- 34. A method of making an integrated circuit, comprising the step of applying a signal to a first surface of a semiconductor substrate to plate an inductor on a second surface of the semiconductor substrate.
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