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Electromagnetic energy controlled low actuation voltage microelectromechanical switch

  • US 20030090350A1
  • Filed: 11/13/2001
  • Published: 05/15/2003
  • Est. Priority Date: 11/13/2001
  • Status: Active Grant
First Claim
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1. A microelectromechanical switch that controls a flow of signals, the switch comprising:

  • a ground plane;

    a signal line;

    a conductive pad responsive to an actuation voltage for controlling the flow of signals in said signal line by selectively making and breaking electrical contact between said conductive pad and said ground and said signal line, without substantially deforming said conductive pad;

    brackets to guide said conductive pad when said conductive pad makes and breaks electrical contact;

    an electrode for attracting said conductive pad when said actuation voltage is applied to said electrode; and

    a photovoltaic source electrically connected to said electrode to supply said actuation voltage in response to electromagnetic energy.

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