Rapid in situ mastering of an aspheric fizeau with residual error compensation

• US 20030090678A1
• Filed: 11/05/2002
• Published: 05/15/2003
• Est. Priority Date: 11/15/2001
• Status: Active Grant

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Evans, Christopher James, Kuchel, Michael
• Granted Patent: US 6,734,979 B2
• Time in Patent Office: Days
• US Class Current: 356/515
• CPC Class Codes: G01B 11/255 for measuring radius of curvature measuring diameter G01B11/08
• CPC Class Codes: G01B 9/02039 by matching the wavefront with a particular object surface shape
• CPC Class Codes: G01B 9/02057 by using common path configuration, i.e. reference and object path almost entirely overlapping
• CPC Class Codes: G01B 9/02072 by calibration or testing of interferometer
• CPC Class Codes: G01J 9/02 by interferometric methods using interferometers for measuring optically the linear dimensions of objects G01B9/02
• CPC Class Codes: G01M 11/025 by determining the shape of the object to be tested measuring contours or curvatures by optical means G01B11/24
• CPC Class Codes: G01M 11/0271 by using interferometric methods

Abstract

A method with a traceable calibration for reducing the uncertainty in the precision measurement of aspheric surfaces and wavefronts. A transmission sphere is mounted in an interferometer and its emergent wavefront is calibrated by comparing it to an optical sphere that is moved and sampled in a predetermined manner to make it act like a substantially “perfect” sphere mounted on a slideway. Afterwards, the calibrated wavefront from the transmission sphere is used to measure a spherical artifact mounted on the slideway to calibrate its surface. A transmission asphere is then mounted in the interferometer, and its emergent wavefront is calibrated by comparing it to the calibrated spherical artifact mounted on the slideway. The calibrated aspheric wavefront from the interferometer is then used to measure an aspherical artifact mounted on the slideway to determine is surface shape. The calibration of the wavefront emerging from the transmission asphere is periodically updated to provide historical data that is used as the basis for quality improvement and assurance.

Claims

1. A method for reducing the uncertainty in the precision measurement of aspheric surfaces and wavefronts, said method comprising the steps of:

mounting a transmission sphere in an interferometer and calibrating its emergent wavefront by comparing it to an optical sphere that is moved and sampled in a predetermined manner to make it act like a substantially perfect sphere mounted on a slideway;

using the calibrated wavefront from the interferometer, measure a spherical artifact mounted on the slideway and calibrate its surface;

mounting a transmission asphere in the interferometer and calibrating its emergent wavefront by comparing it to the calibrated spherical artifact mounted on the slideway; and

using the calibrated aspheric wavefront from the interferometer, measure an aspherical artifact mounted on the slideway and calibrate its surface.

2. The method of claim 1 further including the step of reducing the uncertainty in the final measurement of the aspheric artifact by determining the systematic and non-repeatable motions in the slideway.

3. The method of claim 2 wherein said systematic errors comprise errors from errors in pitch, yaw, and horizontal and vertical errors in the straightness of the slideway.

4. The method of claim 2 further including the step of compensating for said systematic errors by subtracting them from actual measurements.

5. The method of claim 1 further including the step periodically calibrating the aspheric wavefront emerging from the transmission asphere against the calibrated spherical artifact to generate historical calibration information that serves as the basis for assuring the quality of measurements and improvement in their accuracy.

6. The method of claim 2 further including the step of tracking said systematic and non-repeatable errors to assess trends and make appropriate updates in error assessments as needed.

7. The method of claim 1 wherein said interferometer is in form a Fizeau interferometer.

8. The method of claim 1 wherein said optical sphere is an optical sphere assembly comprising:

an optical sphere of nominal radius including internally located motion actuating elements and further includes the steps of;

supporting and positioning said nominal optical sphere such that its center of curvature rests nominally along the optical axis of the interferometer while otherwise being free to rotate; and

actuating said nominal optical sphere to undergo a predetermined motion such that interferometrically measured differences between a wavefront reflected from said nominal optical sphere and an incoming wavefront from the interferometer, when sampled over the surface of said nominal optical sphere as it moves, converge to the departure in the incoming wavefront from its nominal value.

9. The method of claim 8 wherein said nominal optical sphere is hollow constructed of a material that is optically transparent at the operating wavelength of the interferometer.

10. The method of claim 9 wherein said material is a ceramic material marketed under the tradename Zerodur®

).

11. The method of claim 8 wherein said step of actuating said nominal optical sphere is configured and arranged to randomly rotate said nominal optical sphere.

12. The method of claim 8 wherein the step of actuating said nominal optical sphere is configured and arranged to selectively rotate said nominal optical sphere so that different preselected areas of its surface are presented to said incoming wavefront at different preselected times.

13. The method of claim 8 further including the step of dynamically balancing said optical sphere.