TUNABLE FABRY-PEROT FILTER AND TUNABLE VERTICAL CAVITY SURFACE EMITTING LASER
First Claim
Patent Images
1. A tunable Fabry-Perot filter comprising:
- a bottom mirror mounted to the top of a substrate;
a bottom electrode mounted to the top of said bottom mirror;
a thin membrane support atop said bottom electrode;
a top electrode fixed to the underside of said thin membrane support;
a reinforcer fixed to the outside perimeter of said thin membrane support; and
a confocal top mirror set atop said thin membrane support, with an air cavity being formed between said bottom mirror and said top mirror;
and with said thin membrane support being in the form of a dome with openings therein, with said openings being small enough, and with sufficient distance therebetween, so as to substantially not affect the overall structural integrity of said dome, while still allowing chemical access to the region inside the dome.
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Abstract
A tunable Fabry-Perot filter and a tunable vertical cavity surface emitting laser (VCSEL) are disclosed, where both devices utilize an improved dome structure for creating an internal air gap.
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Citations
43 Claims
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1. A tunable Fabry-Perot filter comprising:
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a bottom mirror mounted to the top of a substrate;
a bottom electrode mounted to the top of said bottom mirror;
a thin membrane support atop said bottom electrode;
a top electrode fixed to the underside of said thin membrane support;
a reinforcer fixed to the outside perimeter of said thin membrane support; and
a confocal top mirror set atop said thin membrane support, with an air cavity being formed between said bottom mirror and said top mirror;
and with said thin membrane support being in the form of a dome with openings therein, with said openings being small enough, and with sufficient distance therebetween, so as to substantially not affect the overall structural integrity of said dome, while still allowing chemical access to the region inside the dome. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for making a tunable Fabry-Perot filter, said method comprising the steps of:
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(a) providing a substrate;
(b) forming a bottom mirror on the top surface of said substrate;
(c) forming a bottom electrode on the top surface of said bottom mirror;
(d) depositing a sacrificial structure on the top surface of said bottom electrode;
(e) etch-masking said sacrificial structure so as to leave an inwardly sloped perimeter edge on said sacrificial structure;
(f) depositing a top electrode on said sacrificial structure;
(g) depositing a thin membrane support on top of said sacrificial structure, said top electrode and a portion of said bottom electrode, said thin membrane support being in the form of a dome;
(h) depositing a reinforcer onto said thin membrane support such that said reinforcer covers the sloped perimeter edge of said sacrificial structure and extends inwardly thereof, adjacent to and parallel to the top surface of said sacrificial structure, and outwardly thereof, adjacent to and parallel to the upper surface of said bottom electrode;
(i) etch-masking openings through said thin membrane support, the openings being formed small enough, and with a sufficient distance therebetween, so as to substantially not affect the overall structural integrity of the dome, while still allowing chemicals to be introduced into the region inside the dome;
(j) selectively depositing a top mirror onto the center of said thin membrane support, inboard of the reinforcer; and
(k) selectively removing said sacrificial structure through said openings using an etching technique. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A tunable laser comprising:
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a substrate;
a bottom mirror mounted to the top of said substrate;
a gain region mounted to the top of said bottom mirror;
a bottom electrode mounted to the top of said gain region;
a thin membrane support atop said bottom electrode;
a top electrode fixed to the underside of said thin membrane support;
a reinforcer fixed to the outside perimeter of said thin membrane support; and
a confocal top mirror set atop said thin membrane support;
with an air cavity being formed between said bottom mirror and said top mirror;
and with said thin membrane support being in the form of a dome with openings therein, with said openings being small enough, and with sufficient distance therebetween, so as to substantially not affect the overall structural integrity of the dome, while still allowing chemicals to be introduced into the region inside the dome. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A method for making a tunable laser, said method comprising the steps of:
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(a) providing a substrate;
(b) forming a bottom mirror on the top surface of said substrate;
(c) forming a gain region on the top surface of said bottom mirror;
(d) forming a bottom electrode on the top surface of said gain region;
(e) depositing a sacrificial structure on the top surface of said bottom electrode;
(f) etch-masking said sacrificial structure so as to leave an inwardly sloped perimeter edge on said sacrificial structure;
(g) depositing a top electrode on said sacrificial structure;
(h) depositing a thin membrane support on top of said sacrificial structure, said top electrode and a portion of said bottom electrode, said thin membrane support being in the form of a dome;
(i) depositing a reinforcer onto said thin membrane support such that said reinforcer covers the sloped perimeter edge of said sacrificial structure and extends inwardly thereof, adjacent to and parallel to the top surface of said sacrificial structure, and outwardly thereof, adjacent to and parallel to the upper surface of said bottom electrode;
(j) etch-masking openings through said thin membrane support, the openings being formed small enough, and with a sufficient distance therebetween, so as to substantially not affect the overall structural integrity of the dome, while still allowing chemicals to be introduced into the region inside the dome;
(k) selectively depositing a top mirror onto the center of said thin membrane support, inboard of the reinforcer; and
(l) selectively removing said sacrificial structure through said openings using an etching technique. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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Specification