Angular velocity sensor
First Claim
1. A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional coordinate system, comprising:
- an oscillator.(130;
211;
241;
260;
321;
440;
550;
610) having mass;
a sensor casing (140;
220, 230;
270, 280, 290;
322, 330, 340;
450;
560;
620, 630, 660) for accommodating said oscillator therewithin;
connection means (110;
212;
252;
312;
410;
510;
640, 650) for connecting the oscillator to the sensor casing in a state having a degree of freedom such that the oscillator can move in respective coordinate axial directions;
excitation means (E0 to E5, F0 to F5;
G0 to G10;
D1 to D16;
J1 to J6) for oscillating the oscillator in the respective coordinate axial directions; and
displacement detecting means (E0 to E5, F0 to F5;
G0 to G10;
Rx1 to Rx4, Ry1 to Ry4, Rz1 to Rz4;
D1 to D16;
J1 to J6) for detecting displacements in the respective coordinate axial directions of the oscillator.
1 Assignment
0 Petitions
Accused Products
Abstract
A flexible substrate (110) having flexibility and a fixed substrate (120) disposed so as to oppose it are supported at their peripheral portions by a sensor casing (140). An oscillator (130) is fixed on the lower surface of the flexible substrate. Five lower electrode layers (F1 to F5: F1 and F2 are disposed at front and back of F5) are formed on the upper surface of the flexible substrate. Five upper electrode layers (E1 to E5) are formed on the lower surface of the fixed substrate so as to oppose the lower electrodes. In the case of detecting an angular velocity ω x about the X-axis, an a.c. voltage is applied across a predetermined pair of opposite electrode layers (E5, F5) to allow the oscillator to undergo oscillation Uz in the Z-axis direction. Thus, a Coriolis force Fy proportional to the angular velocity ωx is applied to the oscillator in the Y-axis. By this Coriolis force Fy, the oscillator is caused to undergo displacement in the Y-axis direction. As a result, the distance between opposite electrode layers (E3, F3) arranged in the positive direction of the Y-axis becomes smaller, and the distance between opposite electrode layers (E4, F4) arranged in the negative direction of the Y-axis becomes greater. Thus, capacitance value C3 increases and capacitance value C4 decreases. By change of the capacitance value, it is possible to detect the magnitude of the Coriolis force Fy, and to determine angular velocity ωx. Similarly, it is possible to detect an angular velocity ωy about the Y-axis and an angular velocity ωz about the Z-axis.
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Citations
43 Claims
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1. A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional coordinate system, comprising:
-
an oscillator.(130;
211;
241;
260;
321;
440;
550;
610) having mass;
a sensor casing (140;
220, 230;
270, 280, 290;
322, 330, 340;
450;
560;
620, 630, 660) for accommodating said oscillator therewithin;
connection means (110;
212;
252;
312;
410;
510;
640, 650) for connecting the oscillator to the sensor casing in a state having a degree of freedom such that the oscillator can move in respective coordinate axial directions;
excitation means (E0 to E5, F0 to F5;
G0 to G10;
D1 to D16;
J1 to J6) for oscillating the oscillator in the respective coordinate axial directions; and
displacement detecting means (E0 to E5, F0 to F5;
G0 to G10;
Rx1 to Rx4, Ry1 to Ry4, Rz1 to Rz4;
D1 to D16;
J1 to J6) for detecting displacements in the respective coordinate axial directions of the oscillator. - View Dependent Claims (2, 3)
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4. A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional coordinate system, comprising:
-
a flexible substrate (110;
210;
250;
313) having flexibility;
a fixed substrate (120;
230;
290;
340) disposed so as to oppose the flexible substrate with a predetermined distance therebetween above the flexible substrate;
an oscillator (130;
211, 241;
260;
321) fixed on the lower surface of the flexible substrate;
a sensor casing (140;
220, 230;
270, 280, 290;
322, 330, 340) for supporting the flexible substrate and the fixed substrate and accommodating the oscillator therewithin;
excitation means (E0 to E5, F0 to F5;
G0 to G10) for oscillating the oscillator in respective coordinate axial directions; and
displacement detecting means (E0 to E5, F0 to F5;
G0 to G10) for detecting displacements in respective coordinate axial directions of the oscillator.
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5. A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional coordinate system, comprising:
-
a flexible substrate (110;
250) having flexibility;
a fixed substrate (120;
290) disposed so as to oppose the flexible substrate with a predetermined distance therebetween above the flexible substrate;
an oscillator (130;
260) fixed on the lower surface of the flexible substrate;
a sensor casing (140;
270, 280, 290) for supporting the flexible substrate and the fixed substrate and accommodating the oscillator therewithin;
a plurality of lower electrodes (F1 to F5) provided on an upper surface of the flexible substrate;
a plurality of upper electrodes (E1 to E5;
E0) provided on a lower surface of the fixed substrate and disposed at positions respectively opposite to the plurality of lower electrodes;
means (711, 712) for applying an a.c. signal across a pair of lower and upper electrodes opposite to each other to thereby oscillate the oscillator in respective coordinate axial directions; and
means (721, 722) for detecting an electrostatic capacitance between a pair of lower and upper electrodes opposite to each other to thereby detect displacements in respective coordinate axial directions of the oscillator. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13)
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14. A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional coordinate system, comprising:
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a flexible substrate (313) having flexibility;
a fixed substrate (340) disposed so as to oppose the flexible substrate with a predetermined distance therebetween above the flexible substrate;
an oscillator (321) fixed on the lower surface of the flexible substrate;
a sensor casing (322, 330, 340) for supporting the flexible substrate and the fixed substrate and accommodating the oscillator therewithin;
a plurality of lower electrodes (F1 to F5) provided on an upper surface of the flexible substrate;
a plurality of upper electrodes (E0) provided on a lower surface of the fixed substrate and disposed at positions respectively opposite to the plurality of lower electrodes;
a plurality of piezo resistance elements (Rx1 to Rx4, Ry1 to Ry4, Rz1 to Rz4) provided on the upper surface of the flexible substrate;
means (711, 712) for applying an a.c. signal across a pair of lower and upper electrodes opposite to each other to thereby oscillate the oscillator in respective coordinate axial directions; and
means (350, 361, 362, 363) for detecting a change of a resistance value of said piezo resistance elements to thereby detect displacements in respective coordinate axial directions of the oscillator. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22)
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23. A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional coordinate system, comprising:
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a flexible substrate (410) having flexibility;
a fixed substrate (420) disposed so as to oppose the flexible substrate with a predetermined distance therebetween above the flexible substrate;
an oscillator (440) fixed on the lower surface of the flexible substrate;
a sensor casing (450) for supporting the flexible substrate and the fixed substrate and accommodating the oscillator therewithin;
a plurality of lower electrodes (F1 to F5, F0) provided on an upper surface of the flexible substrate;
a plurality of upper electrodes (E1 to E5) provided on a lower surface of the fixed substrate and disposed at positions respectively opposite to the plurality of lower electrodes;
a piezoelectric element (430) disposed between the lower electrodes and the upper electrodes;
means (711, 712) for applying an a.c. signal across a pair of lower and upper electrodes opposite to each other to thereby oscillate the oscillator in respective coordinate axial directions; and
means (721, 722) for detecting a potential produced across a pair of lower and upper electrodes opposite to each other, thus to detect displacements in respective coordinate axial directions of the oscillator. - View Dependent Claims (24, 25, 26, 27, 28, 29)
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30. A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional coordinate system, comprising:
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a piezoelectric element (520) in a plate form;
a plurality of upper electrodes (L1 to L16) provided on an upper surface of the piezoelectric element;
a plurality of lower electrodes (M1 to M16) provided on a lower surface of the piezoelectric element and disposed at positions respectively opposite to the plurality of upper electrodes;
a flexible substrate (510) fixed on a lower surface of the lower electrode and having flexibility;
an oscillator (550) fixed on a lower surface of the flexible substrate;
a sensor casing (560) for supporting the flexible substrate and accommodating the oscillator therewithin;
means (711, 712) for applying an a.c. signal across a pair of lower and upper electrodes opposite to each other to thereby oscillate the oscillator in respective coordinate axial directions; and
means (721, 722) for detecting a potential produced across a pair of lower and upper electrodes opposite to each other, thus to detect displacements in respective coordinate axial directions of the oscillator. - View Dependent Claims (31, 32, 33, 34, 35, 36)
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37. A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional coordinate system, comprising:
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an oscillator (610) comprised of magnetic material, which is disposed at an origin position of the coordinate system;
a sensor casing (620, 630) for accommodating the oscillator therewithin;
connection means (640, 650) for connecting the oscillator to the sensor casing in a state having a degree of freedom such that the oscillator can move in respective coordinate axial directions;
a first coil pair (J1, J2) attached to the sensor casing at positive and negative positions of a first coordinate axis of the coordinate system;
a second coil pair (J3, J4) attached to the sensor casing at positive and negative positions of a second coordinate axis of the coordinate system;
a third coil pair (J5, J6) attached to the sensor casing at positive and negative positions of a third coordinate axis of the coordinate system;
excitation means (711, 712) for delivering an a.c. signal to the respective coil pairs to thereby oscillate the oscillator in respective coordinate axial directions; and
displacement detecting means (721, 722) for detecting displacements in the respective coordinate axial directions of the oscillator on the basis of changes in impedance of the respective coil pairs. - View Dependent Claims (38)
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39. A multi-axial angular velocity sensor for detecting angular velocity components about at least two coordinate axes in a three-dimensional coordinate system, comprising:
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an oscillator (130;
211;
241;
260;
321;
440;
550;
610) having mass;
a sensor casing (140;
220, 230;
270, 280, 290;
322, 330, 340;
450;
560;
620, 630, 660) for accommodating said oscillator therewithin;
connection means (110;
212;
252;
312;
410;
510;
640, 650) for connecting the oscillator to the sensor casing in a state having a degree of freedom such that the oscillator can move in respective coordinate axial directions;
excitation means (E0 to E5, F0 to F5;
G0 to G10;
D1 to D16;
J1 to J6) for oscillating the oscillator in at least two coordinate axial directions; and
displacement detecting means (E0 to E5, F0 to F5;
G0 to G10;
Rx1 to Rx4;
Ry1 to Ry4, Rz1 to Rz4;
D1 to D16;
J1 to J6) for detecting displacements in at least two coordinate axial directions of the oscillator. - View Dependent Claims (40)
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41. A multi-axial angular velocity sensor for detecting angular velocity components about two coordinate axes (Y, Z) in a three-dimensional coordinate system, comprising:
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an oscillator (130;
211;
241;
260;
321;
440;
550;
610) having mass;
a sensor casing (140;
220, 230;
270, 280, 290;
322, 330, 340;
450;
560;
620, 630, 660) for accommodating said oscillator therewithin;
connection means (110;
212;
252;
312;
410;
510;
640, 650) for connecting the oscillator to the sensor casing in a state having a degree of freedom such that the oscillator can move in respective coordinate axial (X, Y, Z) directions;
excitation means (E0 to E2, F0 to F2;
G0 to G4, G6 to G9;
D1 to D4;
J1, J2) for oscillating the oscillator in a first coordinate axial (X) direction; and
displacement detecting means (E0, E3 to E5, F0, F3 to F5;
G0 to G10;
Ry1 to Ry1, Rz1 to Rz1;
D5 to D16;
J3 to J6) for detecting displacements in a second coordinate axial (Y) direction and in a third coordinate axial (Z) direction of the oscillator;
to detect an angular velocity component about the third coordinate axis (Z) on the basis of a displacement in the second coordinate axial (Y) direction detected by the displacement detecting means; and
to detect an angular velocity component about the second coordinate axis (Y) on the basis of a displacement in the third coordinate axial (Z) direction detected by the displacement detecting means.
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42. A multi-axial angular velocity sensor for detecting angular velocity components about two coordinate axes (X, Y) in a three-dimensional coordinate system, comprising:
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an oscillator (130;
211;
241;
260;
321;
440;
550;
610) having mass;
a sensor casing (140;
220, 230;
270, 280, 290;
322, 330, 340;
450;
560;
620, 630, 660) for accommodating said oscillator therewithin;
connection means (110;
212;
252;
312;
410;
510;
640, 650) for connecting the oscillator to the sensor casing in a state having a degree of freedom such that the oscillator can move in respective coordinate axial (X, Y, Z) directions;
excitation means (E0 to E4, F0 to F4;
G0 to G4, G6 to G9;
D1 to D8;
J1 to J4) for oscillating the oscillator in a first coordinate axial (X) direction and in a second coordinate axial (Y) direction; and
displacement detecting means (E0, E5, F0, F5;
G0, G5, G10;
Rz1 to Rz1;
D9 to D16;
J5, J6) for detecting a displacement in a third coordinate axial (Z) direction of the oscillator;
to detect an angular velocity component about the second coordinate axis (Y) on the basis of a displacement in the third coordinate axial (Z) direction detected by the displacement detecting means when the oscillator is oscillating in the first coordinate axial (X) direction; and
to detect an angular velocity component about the first coordinate axis (X) on the basis of a displacement in the third coordinate axial (Z) direction detected by the displacement detecting means when the oscillator is oscillating in the second coordinate axial (Y) direction.
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43. A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes (X, Y, Z) in a three-dimensional coordinate system, comprising:
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an oscillator (130;
211;
241;
260;
321;
440;
550;
610) having mass;
a sensor casing (140;
220, 230;
270, 280, 290;
322, 330, 340;
450;
560;
620, 630, 660) for accommodating said oscillator therewithin;
connection means (110;
212;
252;
312;
410;
510;
640, 650) for connecting the oscillator to the sensor casing in a state having a degree of freedom such that the oscillator can move in respective coordinate axial directions;
excitation means (E0 to E4, F0 to F4;
G0 to G4, G6 to G9;
D1 to D8;
J1 to J4) for oscillating the oscillator in a first coordinate axial (X) direction and in a second coordinate axial (Y) direction; and
displacement detecting means (E0, E3 to E5, F0, F3 to F5;
G0 to G10;
Ry1 to Ry1, Rz1 to Rz1;
D5 to D16;
J3 to J6) for detecting a displacement in the second coordinate axial (Y) direction and a displacement in a third coordinate axial (Z) direction of the oscillator;
to detect an angular velocity component about the third coordinate axis (Z) on the basis of a displacement in the second coordinate axial (Y) direction detected by the displacement detecting means when the oscillator is oscillating in the first coordinate axial (X) direction, to detect an angular velocity component about the second coordinate axis (Y) on the basis of a displacement in the third coordinate axial (Z) direction detected by the displacement detecting means when the oscillator is oscillating in the first coordinate axial (X) direction, and to detect an angular velocity component about the first coordinate axis (X) on the basis of a displacement in the third coordinate axial (Z) direction detected by the displacement detecting means when the oscillator is oscillating in the second coordinate axial (Y) direction.
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Specification