Scanning microscope, method for scanning microscopy, and bandpass filter

• US 20030095329A1
• Filed: 11/13/2002
• Published: 05/22/2003
• Est. Priority Date: 11/17/2001
• Status: Active Grant

• Current Assignee: Leica Microsystems CMS GmbH (Danaher Corporation)
• Original Assignee: Leica Microsystems Heidelberg GmbH (Danaher Corporation)
• Inventors: Engelhardt, Johann
• Granted Patent: US 6,954,306 B2
• Time in Patent Office: Days
• US Class Current: 359/388
• CPC Class Codes: G01J 3/04 Slit arrangements slit adjustment
• CPC Class Codes: G02B 21/0048 scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
• CPC Class Codes: G02B 21/0064 multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling G02B21/0076 takes precedence

Abstract

A scanning microscope with a light source for illumination of a specimen, a means for spatial spectral division of the detection light, and a detector is disclosed. The scanning microscope has means for selecting a lower limit wavelength that defines a lower exclusion region, and means for selecting an upper limit wavelength that defines an upper exclusion region, as well as a first and a second adjustable stop that block light components of the lower and the upper exclusion region of the detection light. A bandpass filter and a method for scanning microscopy are also disclosed.

Claims

1. A scanning microscope having

a light source for illumination of a specimen,

a means for spatial spectral division of detection light,

means for selecting a lower limit wavelength that defines an upper limit of a lower exclusion region, and

means for selecting an upper limit wavelength that defines a lower limit of an upper exclusion region,

a first and a second adjustable stop that block light components of the lower and the upper exclusion region of the detection light and

and a detector receiving unblocked components of the detection light.

2. The scanning microscope as defined in claim 1, wherein the first and the second stop are rotatable eccentrics.

3. The scanning microscope as defined in claim 2, wherein the means for spatial spectral division of the detection light defines a division plane, and the first and the second stop are rotatable in the division plane.

4. The scanning microscope as defined in claim 2, wherein the means for spatial spectral division of the detection light defines a division plane, and the first and the second stop are rotatable about axes parallel to the division plane.

5. The scanning microscope as defined in claim 1, wherein a focusing means for focusing the detection light is provided.

6. The scanning microscope as defined in claim 1, wherein the means for spatial spectral division contains a prism, a grating, or a hologram.

7. The scanning microscope as defined in claim 1, wherein at least one drive means is provided for setting the first and the second stop.

8. The scanning microscope as defined in claim 7, wherein the drive means contains a motor, a stepper motor, a galvanometer, a piezomotor, or a galvanometer.

9. The scanning microscope as defined in claim 7, wherein the drive means is controlled by a PC.

10. A bandpass filter having:

means for selecting a lower limit wavelength that defines an upper limit of a lower exclusion region,

means for selecting an upper limit wavelength that defines a lower limit of an upper exclusion region,

means for spatial spectral division,

a first and a second adjustable stop that block light components of the lower and the upper exclusion region.

11. The bandpass filter as defined in claim 10, wherein the first and the second stop are rotatable eccentrics.

12. The bandpass as defined in claim 10, wherein the means for spatial spectral division of the detection light defines a division plane, and the first and the second stop are rotatable in the division plane.

13. The bandpass as defined in claim 10, wherein the means for spatial spectral division of the detection light defines a division plane, and the first and the second stop are rotatable about axes parallel to the division plane.

14. The bandpass filter as defined in claim 10, wherein the bandpass filter is positionable in a beam path of a scanning microscope.

15. The bandpass filter as defined in claim 10, wherein at least one drive means is provided for setting the first and the second stop.

16. The bandpass filter as defined in claim 15, wherein the drive means is controlled by a PC.

17. A method for scanning microscopy, a specimen being illuminated with illuminating light of a light source and the detection light proceeding from the specimen being spatially spectrally divided, characterized by the following steps:

selecting a lower limit wavelength that defines a lower exclusion region;

electing an upper limit wavelength that defines an upper exclusion region;

setting the lower exclusion region with a first adjustable stop that blocks the light components of the lower exclusion region;

setting the upper exclusion region with a second adjustable stop that blocks light components of the upper exclusion region; and

detecting the unblocked light components of the detection light.

18. The method as defined in claim 17, wherein the first and the second stop are rotatable eccentrics.

19. The method as defined in claim 17, wherein the means for spatial spectral division of the detection light defines a division plane, and the first and the second stop are rotatable in the division plane.

20. The method as defined in claim 17, wherein the means for spatial spectral division of the detection light defines a division plane, and the first and the second stop are rotatable about axes parallel to the division plane.