HIGH PURITY CORIOLIS MASS FLOW CONTROLLER
First Claim
1. A mass flow measurement and control device, comprising:
- an enclosure;
a Coriolis mass flowmeter situated in the enclosure, the Coriolis mass flowmeter including a flow-tube made of a high-purity plastic material, a driver coupled to the flow tube for vibrating the flow tube, and a pickoff coupled to the flow tube for sensing Coriolis deflections of the vibrating flow tube; and
a pinch valve including an elastomeric tube made of a high-purity plastic material in fluid communication with the flow tube, an actuator having a ram operatively connected thereto situated adjacent the elastomeric tube, and a reference surface positioned generally opposite the ram such that the elastomeric tube is squeezable between the ram and the reference surface.
1 Assignment
0 Petitions
Accused Products
Abstract
A mass flow measurement and control device includes an enclosure with a Coriolis mass flowmeter situated therein. The Coriolis mass flowmeter has a flow-tube made of a high-purity plastic material, a driver coupled to the flow tube for vibrating the flow tube, and a pickoff coupled to the flow tube for sensing Coriolis deflections of the vibrating flow tube. A pinch valve includes an elastomeric tube made of a high-purity plastic material in fluid communication with the flow tube. An actuator with a ram operatively connected thereto is situated adjacent the elastomeric tube, and a reference surface is positioned generally opposite the ram such that the elastomeric tube is squeezable between the ram and the reference surface. A controller may also be provided, which receives an output signal from the Coriolis flowmeter and provides a control output signal to the pinch valve actuator in response to the flowmeter output signal and a setpoint signal.
23 Citations
29 Claims
-
1. A mass flow measurement and control device, comprising:
-
an enclosure;
a Coriolis mass flowmeter situated in the enclosure, the Coriolis mass flowmeter including a flow-tube made of a high-purity plastic material, a driver coupled to the flow tube for vibrating the flow tube, and a pickoff coupled to the flow tube for sensing Coriolis deflections of the vibrating flow tube; and
a pinch valve including an elastomeric tube made of a high-purity plastic material in fluid communication with the flow tube, an actuator having a ram operatively connected thereto situated adjacent the elastomeric tube, and a reference surface positioned generally opposite the ram such that the elastomeric tube is squeezable between the ram and the reference surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
-
-
20. A mass flow measurement and control device, comprising:
-
an enclosure;
a Coriolis mass flowmeter situated in the enclosure, the Coriolis mass flowmeter including a flow-tube made of a high-purity plastic material, a driver coupled to the flow tube for vibrating the flow tube, and a pickoff coupled to the flow tube for sensing Coriolis deflections of the vibrating flow tube; and
a pinch valve including an actuator having a ram operatively connected thereto situated adjacent the flow tube, and a reference surface positioned generally opposite the ram such that the flow tube is squeezable between the ram and the reference surface. - View Dependent Claims (21, 22, 23, 24, 25)
-
-
26. A Coriolis measurement and control device for controlling a process material flow, comprising:
-
an enclosure;
first means for measuring mass flow without transferring ions to the process material, the first means being situated in the enclosure; and
second means for varying fluid flow without transferring unwanted ions to the process material, the second means in fluid communication with the first means;
third means for controlling the second means in response to the first means. - View Dependent Claims (27, 28, 29)
-
Specification