High purity fluid delivery system

• US 20030098069A1
• Filed: 11/26/2001
• Published: 05/29/2003
• Est. Priority Date: 11/26/2001
• Status: Abandoned Application

• Current Assignee: Emerson Electric Company
• Original Assignee: Emerson Electric Company
• Inventors: Sund, Wesley E., Dille, Joseph C., Pawlas, Gary E., Barger, Michael J.
• Application Number:
  US09/995,067
• Publication Number:
  US 20030098069A1
• Time in Patent Office: Days
• US Class Current: 137/487.5
• CPC Class Codes: G01F 1/8413 means for influencing the flowmeter's motional or vibrational behaviour, e.g., conduit support or fixing means, or conduit attachments
• CPC Class Codes: G01F 1/8422 exciters
• CPC Class Codes: G01F 1/8495 with multiple measuring conduits
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/3127 With gas maintenance or application
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve

Abstract

A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.

Claims

1. A fluid delivery system, comprising:

a flow control device;

a Coriolis mass flowmeter in fluid communication with the flow control device, the Coriolis flowmeter having a flow-tube made of a high-purity plastic material, the Coriolis flowmeter providing an output signal;

a controller receiving a setpoint signal, the controller receiving the output signal from the Coriolis flowmeter and providing a control output signal to the flow control device, wherein the flow control device output varies in response to the control output signal.

3. The fluid delivery system of claim 1, wherein the flow control device is comprises a valve.

4. The fluid delivery system of claim 3, wherein the valve comprises a pinch valve.

5. The fluid delivery system of claim 4, wherein the pinch valve comprises:

an actuator having a ram operatively connected thereto;

a reference surface positioned generally opposite the ram;

a high purity, flexible tube positioned between the ram and the reference surface.

6. The fluid delivery system of claim 5, wherein the actuator comprises a solenoid.

7. The fluid delivery system of claim 5, wherein the actuator comprises a stepper motor.

8. The fluid delivery system of claim 1, wherein the flow control device comprises a pump having a variable output.

9. The fluid delivery system of claim 8, wherein the pump comprises a peristaltic pump.

10. The fluid delivery system of claim 1, wherein the flow control device comprises a reservoir, the reservoir being selectively pressurizable.

11. The fluid delivery system of claim 10, wherein the reservoir includes a bag situated therein for containing a fluid.

12. The fluid delivery system of claim 1, wherein the controller comprises a PID controller.

13. The fluid delivery system of claim 1, further comprising:

a plurality of the flow control devices;

a plurality of the Coriolis mass flowmeters; and

a mixing chamber in fluid communication with the flow control devices;

wherein the controller varies the outputs of the flow control devices to achieve a predetermined fluid mixture.

14. The fluid delivery system of claim 1, wherein the output signal provided by the Coriolis mass flowmeter includes a mass flowrate measurement.

15. The fluid delivery system of claim 1, wherein the output signal provided by the Coriolis mass flowmeter includes a fluid density measurement.

16. The fluid delivery system of claim 1, wherein the output signal provided by the Coriolis mass flowmeter includes a fluid temperature measurement.

2. The fluid delivery system of claim 0, wherein the high-purity plastic material comprises PFA.

17. A recirculating fluid distribution system, comprising:

a fluid reservoir;

a distribution conduit in fluid communication with the reservoir, the distribution conduit having a plurality of tool drops for providing fluid from the reservoir to tools attached to the tool drops;

a flow control device;

a Coriolis mass flowmeter in fluid communication with the flow control device, the Coriolis flowmeter having a flow-tube made of a high-purity plastic material, the Coriolis flowmeter providing a output signal;

a pressure transmitter in fluid communication with the Coriolis mass flowmeter, the pressure transmitter providing an output signal;

a controller receiving a setpoint signal, the controller receiving the output signals from the Coriolis flowmeter and the pressure transmitter and providing a control output signal to the flow control device, wherein the flow control device output varies in response to the control output signal to maintain a predetermined pressure and flow rate in the distribution conduit.

18. The recirculating fluid distribution system of claim 17, further comprising:

a plurality of tool drop flow control devices, each of the tool drop flow control devices being in-line with a respective tool drop; and

a plurality of tool drop Coriolis mass flowmeters, each of the tool drop Coriolis mass flowmeters being in-line with a respective tool drop, the tool drop Coriolis mass flowmeters each having a flow-tube made of a high-purity plastic material, the tool drop Coriolis mass flowmeters each providing an output signal;

wherein the controller receives the output signals from the tool drop Coriolis mass flowmeters and provides control signals to the tool drop flow control devices.

19. The recirculating fluid distribution system of claim 18, further comprising a plurality of tool drop controllers, each of the tool drop controllers being associated with a respective tool drop flow control device and a tool drop Coriolis mass flow meter, each tool drop controller receiving the output signal from the associated tool drop Coriolis mass flowmeters and providing control signals to the associated tool drop flow control devices.

20. The recirculating fluid distribution system of claim 17, wherein the flow control device comprises a pinch valve.

21. The recirculating fluid distribution system of claim 17, wherein the pressure transmitter comprises:

a sensor holder;

a pressure chamber including a diaphragm situated in the sensor holder, the pressure chamber and diaphragm constructed of a high purity plastic;

a pressure sensor bonded to the diaphragm; and

an o-ring situated between the diaphragm and the sensor holder.

22. The recirculating fluid distribution system of claim 17, wherein the pressure transmitter comprises:

a sensor holder;

a pressure chamber situated in the sensor holder;

a pressure sensor encapsulated in a high purity plastic material extending into the pressure chamber.

23. The recirculating fluid distribution system of claim 22, wherein the pressure sensor is constructed from sapphire.

24. A fluid delivery system, comprising:

a reservoir having an inlet for receiving a gas to pressurize the reservoir and an outlet for dispensing fluid contained in the reservoir;

a first flow control device connected to the reservoir inlet;

a second flow control device in fluid communication with the reservoir outlet to control fluid flow out of the reservoir,

a Coriolis mass flowmeter in fluid communication with the second flow control device, the Coriolis flowmeter having a flow-tube made of a high-purity plastic material, the Coriolis flowmeter providing an output signal;

a controller receiving a setpoint signal, the controller receiving the output signal from the Coriolis flowmeter and providing control output signals to the first and second flow control devices to vary the pressure of the reservoir and the flow rate of fluid from the reservoir.

25. The fluid delivery system of claim 24, further comprising a pressure transmitter connected to the reservoir inlet, the pressure transmitter providing an output signal to the controller.

26. The fluid delivery system of claim 24, further comprising a pressure transmitter connected to the reservoir outlet.

27. The fluid delivery system of claim 26, wherein the pressure transmitter is connected to the reservoir outlet downstream of the Coriolis mass flowmeter.

28. The fluid delivery system of claim 26, wherein the pressure transmitter is connected to the reservoir outlet upstream of the Coriolis mass flowmeter.

29. The fluid delivery system of claim 24, further comprising first and second pressure transmitters connected to the reservoir outlet upstream and downstream of the Coriolis mass flowmeter, respectively.

30. The fluid delivery system of claim 29, wherein the controller calculates the viscosity of fluid flowing through the system.

31. The fluid delivery system of claim 24, wherein the controller further controls a tool for processing a work piece.

32. The fluid delivery system of claim 24, wherein the controller comprises a fluid delivery controller, the system further comprising a tool controller that controls a tool for processing a work piece, the tool controller providing the setpoint signal to the fluid delivery controller.

33. The fluid delivery system of claim 24, further comprising a filter connected to the reservoir outlet.

34. The fluid delivery system of claim 24, further comprising a bag situated in the reservoir for containing fluid.

35. The fluid delivery system of claim 24, wherein the second flow control device comprises a pinch valve.

36. The fluid delivery system of claim 24, wherein the second flow control device comprises a metering pump.