Tension mask assembly for use in vacuum deposition of thin film of organic electroluminescent device

• US 20030101932A1
• Filed: 08/20/2002
• Published: 06/05/2003
• Est. Priority Date: 12/05/2001
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung NEC Mobile Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Kang, Chang Ho
• Granted Patent: US 6,858,086 B2
• Time in Patent Office: Days
• US Class Current: 118/504
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/164 using vacuum deposition

Abstract

A mask frame assembly used in vacuum deposition of thin films of an organic electroluminescent device. The mask frame assembly includes a frame having an opening and at least two unit masks which each have at least one unit masking pattern portion in the direction of the unit mask and two edges which are fixed to the frame under tension.

Claims

1. A mask frame assembly used in vacuum deposition of thin films of an organic electroluminescent device, comprising:

a frame having an opening; and

at least two unit masks which each have at least one unit masking pattern portion in the direction of the unit mask and two edges which are fixed to the frame under tension.

2. The mask frame assembly according to claim 1, wherein said at least two unit masks are formed as strips and are fixed to said frame such that said unit masks do not physically contact each other.

3. The mask frame assembly according to claim 1, wherein the frame comprises:

support members arranged parallel to each other; and

elastic members which connect the edges of said support members.

4. The mask frame assembly according to claim 1, wherein said at least one unit masking pattern portion comprises slits defined by strips extending in the direction of the unit masking pattern portion parallel to each other.

5. The mask frame assembly according to claim 1, wherein said at least one unit masking pattern portion comprises openings in a predetermined pattern.

6. The mask frame assembly according to claim 4, wherein said strips of said at least two masking pattern portions have non-uniform widths in consideration of tension to be exerted thereon.

7. A mask frame assembly used in vacuum deposition of thin films of an organic electroluminescent device, comprising:

a frame having an opening; and

at least two unit masks, each unit mask having two opposing edges fixed to said frame under tension.

8. The mask frame assembly according to claim 7, wherein each said unit mask has at least one pattern portion in a direction of the unit mask.

9. The mask frame assembly according to claim 7, wherein each said unit mask is welded to said frame by spot welding.

10. The mask frame assembly according to claim 7, wherein each said unit mask is welded to said frame by YAG laser welding.

11. The mask frame assembly according to claim 7, wherein each said unit mask has at least one masking pattern including strips in a direction of the length of said unit mask such that the length of said strips is determined in consideration of Poisson'"'"'s contraction caused by the tension exerted on each said unit mask.

12. The mask frame assembly according to claim 7, wherein a gap between each of said unit mask is maintained in a range of 0.01-1 mm.