ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE

• US 20030103717A1
• Filed: 01/05/2001
• Published: 06/05/2003
• Est. Priority Date: 01/05/2001
• Status: Active Grant

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Bolle, Cristian A., Aksyuk, Vladimir Anatolyevich, Pardo, Flavio
• Granted Patent: US 6,600,851 B2
• Time in Patent Office: Days
• US Class Current: 385/18
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micro-electro-mechanical system (MEMS) actuator device is disclosed. The MEMS actuator device has an actuated element that is rotatably connected to a support structure via torsional members. The torsional members provide a restoring force to keep the actuated element planar to the surface of an underlying substrate. The surface of the substrate has electrodes formed thereon. The electrodes are adapted to receive an electrical potential. When an electrical potential is applied to certain of the electrodes, an electrostatic force is generated which causes the actuated element to rotate out of plane. The electrodes have three components. At least a portion of two of the components is within the tilting area of the actuated element. The third is outside the tilting area of the actuated element. The tilting area is defined as the surface area of the actuated element as projected onto the underlying substrate.

Claims

1. A micro-electrical-mechanical system (MEMS) actuator comprising:

an optical element rotatably coupled to a support structure wherein the support structure supports the optical element in a plane above the plane of a surface of an underlying substrate and wherein the portion of the surface of the underlying substrate directly underlying the optical element defines a tilting area on the underlying substrate;

an electrode formed on the surface of the underlying substrate, wherein the electrode is configured to cause the optical element to rotate when an electrical potential is supplied to the electrode and wherein the electrode has at least three components, a first component and a third component are adapted to receive an actuating voltage and a second component is adapted to be at an electrical potential that is substantially the same as the electrical potential of the optical element, wherein the first and second components are at least partially within the tilting area of the optical element, the third component is outside the tilting area of the optical element and the second component is interposed between the first and third components.

2. The device of claim 1 wherein the optical device is a mirror.

3. The device of claim 1 wherein the second electrode and optical element are adapted to be at ground potential.

4. The device of claim 1 further comprising an array of input ports and an associated first array of MEMS actuators and an array of output ports and an associated second array of MEMS actuators, wherein the first array of MEMS actuators is adapted to controllably direct an optical signal incident on an optical element in the first array from an input port to the second array of MEMS actuators and the second array of MEMS actuators is configured to direct an optical signal incident on an optical element in the array to an output port.

5. The device of claim 1 wherein the optical element rotates through a range of angles, and the third electrode component is outside the tilting area of the optical element throughout the range of angles.

6. The device of claim 1 wherein the optical element is rotatably coupled to the support structure by at least two torsional members.

7. An optical crossconnect comprising:

an optical element supported by a substrate, wherein the optical element is suspended above the substrate by a plurality of torsional members affixed to corresponding support members, the optical element being adapted to rotate about an axis defined by the torsional elements in response to an actuating force provided by an electrode support on the substrate, wherein the electrode has at least three components, a first component being adapted to receive an actuating voltage, a second component being adapted to be placed at an electrical potential that is substantially the same as an electrical potential of the optical element and a third component that is adapted to receive an actuating voltage and does not underlie a tilting area on the substrate defined by the optical element.

8. The optical crossconnect of claim 7 further comprising an array of input ports and an associated first array of MEMS actuators and an array of output ports and an associated second array of MEMS actuators, wherein the first array of MEMS actuators is adapted to controllably direct an optical signal incident on an optical element in the first array from an input port to the second array of MEMS actuators and the second array of MEMS actuators is configured to direct an optical signal incident on an optical element in the array to an output port.

9. A micro-electrical-mechanical system (MEMS) actuator comprising:

an actuated element rotatably coupled to a support structure wherein the support structure supports the actuated element in a plane above the plane of a surface of an underlying substrate and wherein the portion of the surface of the underlying substrate directly underlying the actuated element defines a tilting area on the underlying substrate;

an electrode formed on the surface of the underlying substrate, wherein the electrode is configured to cause the actuated element to rotate when an electrical potential is supplied to the electrode and wherein the electrode has at least three components, a first component and a third component that are adapted to receive an actuating voltage and a second component that is adapted to be at an electrical potential that is substantially the same as the electrical potential of the actuated element, wherein the first and second components are at least partially within the tilting area of the actuated element, the third component is outside the tilting area of the actuated element and the second component is interposed between the first and third components.

10. The device of claim 9 wherein the actuated device is a mirror.

11. The device of claim 10 wherein the actuated device is a probe.

12. The device of claim 9 wherein the second electrode and optical element are adapted to be at ground potential.

13. The device of claim 9 wherein the actuated element rotates through a range of angles, and the third electrode component is outside the tilting area of the actuated element throughout the range of angles.

14. The device of claim 9 wherein the actuated element is rotatably coupled to the support structure by at least two torsional members.