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Self-normalizing flow sensor and method for the same

  • US 20030106380A1
  • Filed: 01/21/2003
  • Published: 06/12/2003
  • Est. Priority Date: 06/04/1999
  • Status: Active Grant
First Claim
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1. An apparatus for use in normalizing a main flow rate of a fluid in a main flow channel, comprising:

  • a normalizing flow sensor that measures a dither flow rate; and

    a moveable member disposed for producing said dither flow rate, said dither flow rate being substantially independent of said main flow rate in said main flow channel and substantially independent of fluid composition.

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