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Surface treatment apparatus

  • US 20030106643A1
  • Filed: 10/04/2002
  • Published: 06/12/2003
  • Est. Priority Date: 12/07/1999
  • Status: Abandoned Application
First Claim
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1. A surface treatment apparatus for making raw material gas plasma by generating plasma, in a casing provided with plasma generation means, a raw material gas inlet and a substrate support table, by the plasma generation means and giving plasma treatment to the surface of a substrate placed on said substrate support table, wherein:

  • said casing is defined into two chambers, a plasma generation chamber provided with said plasma generation means and a substrate treatment chamber provided with said substrate support table;

    said substrate treatment chamber and said plasma generation chamber are connected through one or more plasma nozzles; and

    at least one of said plasma nozzles is made a hollow discharge generation area.

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