×

Sensor package for harsh environments

  • US 20030107467A1
  • Filed: 04/22/2002
  • Published: 06/12/2003
  • Est. Priority Date: 12/07/1998
  • Status: Active Grant
First Claim
Patent Images

1. A sensor for detecting liquid flow in harsh environments, said sensor comprising:

  • a flow channel block having a flow channel formed therein;

    a sensor chip for sensing fluid flow, wherein said sensor chip is located proximate to said flow channel of said flow channel block;

    a substrate in communication with said sensor chip and at least one electrical contact bonded to it by at least one bonding element; and

    a core tube between said flow channel block and said flow channel thereby permitting said sensor to be utilized to detect liquid flow in harsh environments.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×