Method and apparatus for removing organic films
First Claim
1. A method for removing an organic film on a surface of a substrate, comprising:
- bringing a treatment liquid comprising liquid ethylene carbonate, propylene carbonate, or both of them into contact with said substrate to remove said organic film, thereby allowing material constituting said organic film to migrate into said treatment liquid, decomposing said material in said treatment liquid into low molecular weight material by ozone, thereby said ozone treated treatment liquid being regenerated as a treatment liquid, and recycling the treatment liquid thus regenerated for treating another substrate.
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Accused Products
Abstract
A method and an apparatus for removing an organic film such as a resist film from a substrate surface are provided. These are very safe even at high temperatures, and use a treatment liquid which can be recycled and reused. A treatment liquid typically formed from liquid ethylene carbonate, propylene carbonate, or a liquid mixture of these two compounds, and in particular such a treatment liquid containing dissolved ozone, is contacted with a substrate with an organic film, and the organic film is removed. Furthermore, an apparatus of the present invention (A) a treatment liquid delivery device for transporting the treatment liquid to a treatment area, (B) a film contact device for bringing the treatment liquid into contacting with the organic film surface of the substrate within the treatment area, (C) a liquid circulation device for recycling treatment liquid discharged from the treatment area and returning the recycled liquid to the treatment area via one or more temporary storage devices, and (D) an ozone dissolution device for bringing ozone containing gas into contact with the treatment liquid either within the treatment area and/or within the temporary storage devices.
27 Citations
33 Claims
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1. A method for removing an organic film on a surface of a substrate, comprising:
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bringing a treatment liquid comprising liquid ethylene carbonate, propylene carbonate, or both of them into contact with said substrate to remove said organic film, thereby allowing material constituting said organic film to migrate into said treatment liquid, decomposing said material in said treatment liquid into low molecular weight material by ozone, thereby said ozone treated treatment liquid being regenerated as a treatment liquid, and recycling the treatment liquid thus regenerated for treating another substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for removing an organic film on a surface of a substrate, comprising:
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bringing a treatment liquid containing ozone dissolved in a liquid comprising ethylene carbonate, propylene carbonate, or both of them into contact with said substrate with an organic film on a surface thereof to remove said organic film, wherein said organic film is dissolved said treatment liquid and decomposed into low molecular weight material, and using the treatment liquid after removal of said organic film for treating another substrate. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. An apparatus for removing an organic film from a surface of a substrate comprising:
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(A) a treatment liquid delivery means for transporting a treatment liquid comprising liquid ethylene carbonate, propylene carbonate, or both thereof to a treatment area, (B) a film contact means for bringing said treatment liquid into contact with the surface of said organic film of said substrate within said treatment area, (C) a treatment liquid circulation means for recycling the treatment liquid used and discharged from said treatment area back to said treatment area via one or more temporary storage means, and (D) an ozone-containing gas contact means for bringing an ozone-containing gas into contact with said treatment liquid discharged from said treatment area within said treatment area and/or within at least one of said temporary storage means. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33)
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Specification