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Surface smoothing device and method thereof

  • US 20030109092A1
  • Filed: 10/25/2002
  • Published: 06/12/2003
  • Est. Priority Date: 10/25/2001
  • Status: Abandoned Application
First Claim
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1. A surface smoothing device comprising:

  • an operating gas supplying device for supplying operating gas;

    a diffusion chamber connected to a convergent and divergent nozzle which changes the operating gas supplied from the operating gas supplying device into cluster state;

    a source chamber including a skimmer connected to the diffusion chamber for extracting a part of the operating gas in cluster state, and an ionizing device for ionizing the operating gas of cluster state selected by the skimmer;

    an acceleration chamber including a lens for increasing a cluster ion beam current, and an accelerating device for accelerating the cluster ion; and

    a process chamber in which the accelerated cluster ion is irradiated on a sample to flatten a surface of the sample.

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