Diaphragm valve, substrate processing unit and substrate processing apparatus
First Claim
1. A diaphragm valve having an inlet port receiving a fluid and an outlet port discharging said fluid, comprising:
- an opening/closing diaphragm capable of closing a passage reaching said outlet port from said inlet port by adhering to a valve seat provided on said passage and opening said passage by separating from said valve seat;
a working part working said opening/closing diaphragm between a closing state closing said passage and an opening state opening said passage; and
a volume change compensation part provided on a side of said passage closer to said outlet port than said opening/closing diaphragm for compensating for volume change caused in a secondary passage of said passage closer to said outlet port than said opening/closing diaphragm when said opening/closing diaphragm is worked.
1 Assignment
0 Petitions
Accused Products
Abstract
A first diaphragm adheres to a valve seat thereby closing a passage, and separates from the valve seat thereby opening the passage. A link rod couples a second diaphragm identical in shape to the first diaphragm for opening/closing with the first diaphragm. Therefore, the second diaphragm is mechanically interlocked with the first diaphragm, to compensate for volume change caused in a downstream passage when the first diaphragm is worked. Also when the first diaphragm is rapidly worked, therefore, the second diaphragm immediately compensates for subsequent volume change so that no resist is pulled back to or extruded from the downstream passage. Thus provided is a diaphragm valve capable of stably supplying a solution also when a valve is opened/closed.
27 Citations
20 Claims
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1. A diaphragm valve having an inlet port receiving a fluid and an outlet port discharging said fluid, comprising:
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an opening/closing diaphragm capable of closing a passage reaching said outlet port from said inlet port by adhering to a valve seat provided on said passage and opening said passage by separating from said valve seat;
a working part working said opening/closing diaphragm between a closing state closing said passage and an opening state opening said passage; and
a volume change compensation part provided on a side of said passage closer to said outlet port than said opening/closing diaphragm for compensating for volume change caused in a secondary passage of said passage closer to said outlet port than said opening/closing diaphragm when said opening/closing diaphragm is worked. - View Dependent Claims (2, 3, 4, 5)
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6. A diaphragm valve having an inlet port receiving a fluid and an outlet port discharging said fluid, comprising:
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an opening/closing diaphragm, formed by an elastic member, capable of closing a passage reaching said outlet port from said inlet port by adhering to a valve seat provided on said passage and opening said passage by separating from said valve seat;
a working part working said opening/closing diaphragm between a closing state closing said passage and an opening state opening said passage;
a closed space forming member formed by a member not substantially deformed by a working pressure of said working part working said opening/closing diaphragm for sealing the inner side of said opening/closing diaphragm thereby defining a closed space; and
an incompressible fluid filling up said closed space.
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7. A substrate processing unit supplying a processing solution to a substrate for performing prescribed processing, comprising:
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a) a holding part holding said substrate;
b) a discharge nozzle discharging said processing solution to said substrate held by said holding part;
c) a feed source feeding said processing solution to said discharge nozzle;
d) a pipe communicatively connecting said feed source and said discharge nozzle with each other for guiding said processing solution from said feed source to said discharge nozzle; and
e) a diaphragm valve provided on an intermediate portion of the path of said pipe, said diaphragm valve comprising;
e-1) an inlet port receiving said processing solution, e-2) an outlet port discharging said processing solution, e-3) an opening/closing diaphragm capable of closing a passage reaching said outlet port from said inlet port by adhering to a valve seat provided on said passage and opening said passage by separating from said valve seat, e-4) a working part working said opening/closing diaphragm between a closing state closing said passage and an opening state opening said passage, and e-5) a volume change compensation part provided on a side of said passage closer to said outlet port than said opening/closing diaphragm for compensating for volume change caused in a secondary passage of said passage closer to said outlet port than said opening/closing diaphragm when said opening/closing diaphragm is worked. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. A substrate processing apparatus performing a series of processing consisting of a plurality of steps on a substrate, comprising:
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a) a coating processing unit, performing resist coating processing on said substrate, comprising;
a-1) a holding part holding said substrate, a-2) a discharge nozzle discharging photoresist to said substrate held by said holding part, a-3) a feed source feeding said photoresist to said discharge nozzle, a-4) a pipe communicatively connecting said feed source and said discharge nozzle with each other for guiding said photoresist from said feed source to said discharge nozzle, and a-5) a diaphragm valve, provided on an intermediate portion of the path of said pipe, comprising;
a-5-1) an inlet port receiving said photoresist, a-5-2) an outlet port discharging said photoresist, a-5-3) an opening/closing diaphragm capable of closing a passage reaching said outlet port from said inlet port by adhering to a valve seat provided on said passage and opening said passage by separating from said valve seat, a-5-4) a working part working said opening/closing diaphragm between a closing state closing said passage and an opening state opening said passage, and a-5-5) a volume change compensation part provided on a side of said passage closer to said outlet port than said opening/closing diaphragm for compensating for volume change caused in a secondary passage of said passage closer to said outlet port than said opening/closing diaphragm when said opening/closing diaphragm is worked;
b) a development processing unit developing said substrate;
c) a thermal processing unit thermally processing said substrate; and
d) a transport part transporting said substrate between respective said processing units. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification