Following stage planar motor
First Claim
Patent Images
1. A stage assembly comprising:
- a first motor that includes a first part and a second part, the first motor producing a first force;
a second motor that includes a first part and a second part, the second motor producing a second force;
a base to which the first part of the first motor is attached;
a stage to which is attached the second part of the first motor and the second part of the second motor, the stage moving relative to the base by at least one of the first force and the second force; and
a second stage to which the first part of the second motor is attached;
wherein the base and the second stage are different respective bodies.
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Abstract
In electric motor assemblies, separating the x and y coils may achieve significant advantages. An advantageous design includes pairs of interacting magnet array/coil arrays. Separated coil arrays are provided, with a coil array on an arm connected to a following stage, and another coil array on a stage base (the stage being one to which is attached magnet arrays). Positioning devices, moving magnet motor assemblies, moving coil motor assemblies, and methods of driving a stage are provided. By differential driving and creation of torques about the x and y axes, a stage may be driven in six independent degrees of freedom.
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Citations
26 Claims
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1. A stage assembly comprising:
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a first motor that includes a first part and a second part, the first motor producing a first force;
a second motor that includes a first part and a second part, the second motor producing a second force;
a base to which the first part of the first motor is attached;
a stage to which is attached the second part of the first motor and the second part of the second motor, the stage moving relative to the base by at least one of the first force and the second force; and
a second stage to which the first part of the second motor is attached;
wherein the base and the second stage are different respective bodies. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A stage assembly comprising:
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a first motor that includes a first part and a second part, the first motor producing a first force;
a second motor that includes a first part and a second part, the second motor producing a second force;
a base to which the first part of the first motor is attached;
a stage to which is attached the second part of the first motor and the second part of the second motor, the stage moving relative to the base by at least one of the first force and the second force; and
the first part of the second motor being attached to a second body that is different from the base.
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19. A method for driving a stage, comprising
driving the stage by (a) a first force produced by a first motor including a first part and a second part that interacts with the first part; - and (b) a second force produced by a second motor including a first part and a second part that interacts with the first part of the second motor,
with the first part of the first motor and the first part of the second motor being separate, wherein the first part of the first motor is attached to a base that supports the stage and the first part of the second motor is attached to a different body from the base. - View Dependent Claims (20, 21, 22, 23)
- and (b) a second force produced by a second motor including a first part and a second part that interacts with the first part of the second motor,
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24. An exposure apparatus comprising:
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an illumination system that irradiates radiant energy; and
an apparatus comprising;
a first motor that includes a first part and a second part, the first motor producing a first force;
a second motor that includes a first part and a second part, the second motor producing a second force;
a base to which the first part of the first motor is attached;
a stage to which is attached the second part of the first motor and the second part of the second motor, the stage moving relative to the base by at least one of the first force and the second force; and
a second stage to which the first part of the second motor is attached, wherein the base and the second stage are different respective bodies;
the apparatus disposing an object on a path of the radiant energy. - View Dependent Claims (25, 26)
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Specification