Aligning apparatus in semiconductor device test handler

• US 20030111970A1
• Filed: 12/09/2002
• Published: 06/19/2003
• Est. Priority Date: 12/17/2001
• Status: Active Grant

• Current Assignee: Mirae Corporation
• Original Assignee: Mirae Corporation
• Inventors: Cho, Jae Hyuk
• Granted Patent: US 6,891,341 B2
• Time in Patent Office: Days
• US Class Current: 318/34
• CPC Class Codes: G01R 31/2893 Handling, conveying or loading, e.g. belts, boats, vacuum fingers G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H01L21/67
• CPC Class Codes: H01L 21/68 for positioning, orientation or alignment
• CPC Class Codes: Y10S 414/135 Associated with semiconductor wafer handling

Abstract

Disclosed is an aligning apparatus in a semiconductor device test handler enabling to reduce a time taken for loading semiconductor devices on a test tray by means of an aligner and a lower pushing unit which are driven to operate independently to align the semiconductor devices.

Claims

1. An aligning apparatus in a semiconductor device handler, comprising:

first and second guide members installed in parallel at a handler body to confront each other;

third and fourth guide members installed in parallel with and under the first and second guide members, respectively;

a first aligner having both ends coupled with the first and second guide members respectively to move along the first and second guide members wherein a plurality of device landing recesses are arranged on the first aligner to leave a predetermined interval from each other;

a second aligner having both ends coupled with the third and fourth guide members respectively to be installed in a level lower than that of the first aligner wherein a plurality of device landing recesses are arranged on the second aligner to leave a predetermined interval from each other;

a first driving means for driving the first aligner along the first and second guide members; and

a second driving means for driving the second aligner along the third and fourth guide members separately from the first aligner.

2. The aligning apparatus of claim 1, the first driving means comprising:

a first driving motor installed at one side of the first or second guide member;

a first driving shaft installed across one ends of the first and second guide members to be coupled with the first driving motor to revolve;

a pair of driving pulleys installed at both ends of the first driving shaft, respectively;

a pair of driven pulleys installed at the other ends of the first and second guide members to revolve, respectively; and

first and second driving belts hooked on the driving and driven pulleys to be driven and coupled with both ends of the first aligner, respectively.

3. The aligning apparatus of claim 1, the second driving means comprising:

a second driving motor installed at one side of the third or fourth guide member;

a second driving shaft installed across one ends of the third and fourth guide members to be coupled with the second driving motor to revolve;

a pair of driving pulleys installed at both ends of the second driving shaft, respectively;

a pair of driven pulleys installed at the other ends or the third and fourth guide members to revolve, respectively; and

third and fourth driving belts hooked on the driving and driven pulleys to be driven and coupled with both ends of the second aligner, respectively.

4. The aligning apparatus of claim 2, the second driving means comprising:

a second driving motor installed at one side of the third or fourth guide member;

a second driving shaft installed across one ends of the third and fourth guide members to be coupled with the second driving motor to revolve;

a pair of driving pulleys installed at both ends of the second driving shaft, respectively;

a pair of driven pulleys installed at the other ends of the third and fourth guide members to revolve, respectively; and

third and fourth driving belts hooked on the driving and driven pulleys to be driven and coupled with both ends of the second aligner, respectively.

5. The aligning apparatus of claim 1, wherein the second aligner is installed to move upward and downward at front and rear ends of the third and fourth guide members to be disposed in the same level of the first aligner and wherein an elevating means for elevating the second aligner to a predetermined level to is installed under both ends of the second aligner.

6. The aligning apparatus of claim 5, the elevating means comprising:

a pair of movable blocks coupled to move along the third and fourth guide members wherein both of the ends of the second aligner are coupled with the movable blocks to be elevated, respectively; and

a pair of cylinders coupled with both of the ends of the second aligner at one sides of the movable blocks, respectively.