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Distributed bragg reflector and method of fabrication

  • US 20030112517A1
  • Filed: 12/14/2001
  • Published: 06/19/2003
  • Est. Priority Date: 12/14/2001
  • Status: Active Grant
First Claim
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1. A method of fabricating a Bragg reflector comprising:

  • forming at least one structure layer and at least one sacrificial layer in alternating relation on a substrate;

    etching the structure and sacrificial layers into at least one mesa protruding from the substrate;

    forming a support layer on the at least one mesa leaving a portion of the structure and the sacrificial layers exposed; and

    etching at least a portion of at least one of the exposed sacrificial layers to form a gap.

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