MEMS device having a trilayered beam and related methods
First Claim
1. A movable, trilayered microcomponent suspended over a substrate, the microcomponent comprising:
- (a) a first electrically conductive layer patterned to define a movable electrode, the first electrically conductive layer separated from a substrate by a gap;
(b) a dielectric layer formed on the first electrically conductive layer and including at least one end fixed with respect to the substrate; and
(c) a second electrically conductive layer formed on the dielectric layer and patterned to define an electrode interconnect connected to the movable electrode for electrical communication.
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Accused Products
Abstract
MEMS Device Having A Trilayered Beam And Related Methods. According to one embodiment, a movable, trilayered microcomponent suspended over a substrate is provided and includes a first electrically conductive layer patterned to define a movable electrode. The first metal layer is separated from the substrate by a gap. The microcomponent further includes a dielectric layer formed on the first metal layer and having an end fixed with respect to the substrate. Furthermore, the microcomponent includes a second electrically conductive layer formed on the dielectric layer and patterned to define an electrode interconnect for electrically communicating with the movable electrode.
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Citations
51 Claims
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1. A movable, trilayered microcomponent suspended over a substrate, the microcomponent comprising:
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(a) a first electrically conductive layer patterned to define a movable electrode, the first electrically conductive layer separated from a substrate by a gap;
(b) a dielectric layer formed on the first electrically conductive layer and including at least one end fixed with respect to the substrate; and
(c) a second electrically conductive layer formed on the dielectric layer and patterned to define an electrode interconnect connected to the movable electrode for electrical communication. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An actuator having a movable, trilayered microcomponent, the actuator comprising:
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(a) a stationary electrode;
(b) a resilient structural layer including at least one end fixed with respect to the stationary electrode, a bottom surface suspended over the stationary electrode, and a top surface;
(c) a movable electrode attached to the bottom surface of the resilient structural layer whereby the movable electrode is separated from the stationary electrode by a gap; and
(d) an electrode interconnect attached to the top surface of the structural layer and connected to the movable electrode for electrical communication. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A microscale, electrostatically actuated switch having a movable, trilayered microcomponent, the switch comprising:
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(a) a substrate including a stationary electrode and a stationary contact attached thereto;
(b) a resilient structural layer including at least one end fixed with respect to the substrate, a bottom surface suspended over the substrate, and a top surface opposing the bottom surface;
(c) a movable electrode attached to the bottom surface of the resilient structural layer whereby the movable electrode is separated from the stationary electrode by a first gap;
(e) an electrode interconnect attached to the top surface of the resilient structural layer and connected to the movable electrode for electrical communication;
(f) a movable contact attached to the bottom surface of the structural layer whereby the movable contact is separated from the stationary contact by a second gap; and
(g) a contact interconnect formed on the top surface of the structural layer and connected to the movable contact for electrical communication. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 44, 45)
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43. A microscale, electrostatically actuated switch having a movable, trilayered component, the switch comprising:
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(a) a substrate including a first and second stationary electrode and a stationary contact attached thereto, wherein the stationary contact is positioned between the first and second stationary electrodes;
(b) a resilient structural layer including a first and second end fixed with respect to the substrate and including first, second, and third portions including top and bottom surfaces, the bottom surfaces suspended over the substrate;
(c) a first movable electrode attached to the bottom surface of the first portion and suspended over the first stationary electrode;
(d) a first electrode interconnect attached to the top surface of the first portion and electrically connected to the first movable electrode;
(e) a second movable electrode attached to the bottom surface of the second portion and suspended over the second stationary electrode;
(f) a second electrode interconnect attached to the top surface of the second portion and electrically connected to the second movable electrode;
(g) a movable contact attached to the bottom surface of the third portion and suspended over the stationary contact; and
(h) a contact interconnect attached to the top surface of the third portion and electrically connected to the movable contact.
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46. A microscale, electrostatically actuated switch having a movable, trilayered microcomponent, the switch comprising:
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(a) a substrate including a stationary electrode and a stationary contact attached thereto;
(b) a resilient structural layer including at least one end fixed with respect to the substrate, a bottom surface suspended over the substrate, and a top surface opposing the bottom surface;
(c) a movable electrode attached to the bottom surface of the resilient structural layer whereby the movable electrode is separated from the stationary electrode by a gap;
(d) a movable contact attached to the bottom surface of the structural layer whereby the movable contact is separated from the stationary contact by a gap; and
(e) a contact interconnect formed on the top surface of the structural layer, connected to the movable contact for electrical communication, and dimensioned substantially equal to and aligned with movable contact and movable electrode. - View Dependent Claims (47, 48, 49, 50)
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51. A method of implementing an actuation function in an actuator having a movable, trilayered microcomponent, comprising:
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(a) providing an actuator having a movable, trilayered microcomponent, the actuator comprising;
(i) a stationary electrode;
(ii) a resilient structural layer including at least one end fixed with respect to the stationary electrode, a bottom surface suspended over the stationary electrode, and a top surface;
(iii) a movable electrode attached to the bottom surface of the resilient structural layer whereby the movable electrode is separated from the stationary electrode by a gap; and
(iv) an electrode interconnect attached to the top surface of the structural layer and electrically connected to the movable electrode for electrically communicating with the movable electrode; and
(b) applying a voltage between the electrode interconnect and the stationary electrode to electrostatically couple the movable electrode with the stationary electrode across the gap, whereby the resilient structural layer is deflected toward the substrate.
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Specification