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Probe with a diffraction grating for +1,0 and -1 orders

  • US 20030117633A1
  • Filed: 11/25/2002
  • Published: 06/26/2003
  • Est. Priority Date: 05/23/2000
  • Status: Abandoned Application
First Claim
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1. A measuring device (1), particularly for measuring the surface roughness and/or the surface contour of a workpiece (3), having a probe element (4), which is seated to move and can be brought into contact with the workpiece surface (2), having a diffraction grating (32), which is seated to move and is connected to the probe element (4), having a light source (31) for generating a light bundle (34) that is capable of interference and is aimed at the diffraction grating (32) for generating an interference light bundle (34a) having at least one zero maximum (0), a plus one maximum (+1) and a minus one maximum (−

  • 1), and having an optical sensor arrangement (33), which is exposed to the interference light bundle (34a) originating from the diffraction grating (32).

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