Controller, temperature regulator and heat treatment apparatus

• US 20030121905A1
• Filed: 10/10/2002
• Published: 07/03/2003
• Est. Priority Date: 04/14/2000
• Status: Active Grant

• Current Assignee: Omron Corporation
• Original Assignee: Omron Corporation
• Inventors: Kataoka, Yuuki, Wakabayashi, Takeshi, Nanno, Ikuo, Mukai, Atsushi, Tanaka, Masahito, Kitamura, Hirokazu, Takaishi, Akira, Furukawa, Motohisa, Kobori, Hideki, Ooba, Tsunetoshi, Narimatsu, Seiya, Ando, Kousaku, Uchiyama, Naotaka, Nakamizo, Nobumasa
• Granted Patent: US 6,951,998 B2
• Time in Patent Office: Days
• US Class Current: 219/494
• CPC Class Codes: G05B 11/32 with inputs from more than one sensing element; with outputs to more than one correcting element
• CPC Class Codes: G05B 11/42 for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
• CPC Class Codes: G05B 13/024 in which a parameter or coefficient is automatically adjusted to optimise the performance
• CPC Class Codes: G05D 23/1919 characterised by the type of controller
• CPC Class Codes: G05D 23/1932 to control the temperature of a plurality of spaces
• CPC Class Codes: G05D 23/20 with sensing elements having variation of electric or magnetic properties with change of temperature G05D23/13 takes precedence

Abstract

A plurality of individually corresponding heaters and temperature sensors are provided along with a plurality of a PID control means. An average temperature/gradient temperature calculating means calculates the average temperatures of the temperatures measured by the temperature sensors and the gradient temperatures based on the measured temperatures. Each of the PID control means outputs an operation signal so that the average temperatures or gradient temperatures may be made equal to the desired values. A distributing means distributes the operation signal from each of the PID control means to each heater so that control by the PID control means may produce no effect on the control of the other PID control means.

Claims

1. A controller comprising:

a converting means for converting detection information from plural detecting means for respectively detecting physical conditions of a control target into information indicating a gradation of said physical conditions and information indicating a representative of the physical conditions in accordance with a conversion matrix;

a plurality of condition control means individually given the information from said converting means; and

a distribution means for distributing operation signals transmitted from said plurality of condition control means to a plurality of operating means for operating said control target so that control of each of said plurality of condition control means may produce less effect on control of another condition control means, said distribution means distributing the operation signals, based on a matrix of a distribution ratio found as a reverse matrix of the product of said conversion matrix by a matrix of a transmission function of said control target.

7. A controller according to claim 1 further comprising a limiting means which is disposed in the former stage of said distribution means and limits the operation signals from at least one of said condition control means.

11. A controller according to claim 1 further comprising a tuning means for tuning a balance in condition control between the condition control means to be supplied with the information indicating the gradient and the condition control means to be supplied with the information indicating the representative.

15. A controller according to claim 1, wherein a coefficient of transmission (transmission function) is previously found to determine a distribution ratio used in said distribution means by measuring changes in the detection information of said detecting means by changing the operation signals of said plurality of condition control means.

2. A controller comprising:

a converting means for converting a deviation between detection information from plural detecting means for respectively detecting physical conditions of a control target and plural pieces of target information individually corresponding to said plural detecting means into a deviation of information indicating a gradation of said physical conditions and a deviation of information indicating a representative of the physical conditions in accordance with a conversion matrix;

a plurality of condition control means for individually outputting operation signals by using as a control deviation the deviation of the information indicating said gradation or control target so that control of each of said plurality of condition control means may produce less effect on control of another condition control means.

8. A controller according to claim 2 further comprising a limiting means which is disposed in the former stage of said distribution means and limits the operation signals from at least one of said plurality of condition control means.

12. A controller according to claim 2 further comprising a tuning means for tuning a balance in condition control between the condition control means which outputs an operation signal using the deviation of the information indicating said gradient as the control deviation, and the condition control means which outputs an operation signal using the deviation of the information indicating said representative as the control deviation.

16. A controller according to claim 2, wherein a coefficient of transmission (transmission function) is previously found to determine a distribution ratio used in said distribution means by measuring changes in the detection information of said detecting means by changing the operation signals of said plurality of condition control means.

3. A controller comprising:

a plurality of condition control means for individually outputting operation signals to a plurality of operating means individually corresponding to a plurality of detecting means, based on each deviation between plural pieces of detection information from the plurality of detecting means for detecting physical conditions of a control target and plural pieces of target information; and

at least one interference-reducing control means for outputting, based on a deviation corresponding to one of the detecting means, an operation signal to one of the plurality of operating means that does not correspond to the one of said detecting means.

4. A controller according to claim 3, wherein

said plurality of condition control means and said interference-reducing control means function as:

a converting means for converting each deviation between the plural pieces of detection information and the plural pieces of target information into a deviation of information indicating a gradient of said physical conditions of the control target and a deviation of information indicating a representative of said physical conditions;

a plurality of condition control means for individually outputting operation signals, based on the deviation of the information indicating said gradient or the deviation of the information indicating said representative obtained from said converting means; and

a distribution means for distributing the operation signals transmitted from said plurality of condition control means to a plurality of operating means for operating said control target so that control of each of said plurality of condition control means may produce less effect on control of another condition control means.

5. A controller comprising:

an estimating means for estimating physical conditions of an object to be processed and outputting plural pieces of estimation information, based on detection information transmitted from a plurality of detecting means for individually detecting physical conditions of a process means for processing said object;

a converting means for converting the plural pieces of estimation information estimated by said estimating means into information indicating a gradient of said physical conditions and information indicating a representative of the physical conditions;

a plurality of condition control means for individually outputting operation signals, based on the information indicating the gradient or the information indicating the representative transmitted from said converting means; and

a distribution means for distributing the operation signals transmitted from said condition control means to a plurality of operating means for operating said processing means so that control of each of said plurality of condition control means may produce less effect on control of another condition control means.

9. A controller according to claim 5 further comprising a limiting means which is disposed in the former stage of said distribution means and limits the operation signals from at least one of said plurality of condition control means.

13. A controller according to claim 5 further comprising a tuning means for tuning a balance in condition control between the condition control means to be supplied with the information indicating said gradient and the condition control means to be supplied with the information indicating the representative.

17. A controller according to claim 5, wherein a coefficient of transmission (transmission function) is previously found to determine a distribution ratio used in said distribution means by measuring changes in the detection information of said detecting means by changing the operation signals of said plurality of condition control means.

6. A controller comprising:

an estimating means for estimating physical conditions of an object to be processed and outputting plural pieces of estimation information, based on detection information transmitted from a plurality of detecting means for individually detecting physical conditions of a processing means for processing said object;

a converting means for converting a deviation between plural pieces estimation information and plural pieces of target information estimated by said estimating means into a deviation of information indicating a gradient of said physical conditions and a deviation of information indicating a representative of the physical conditions;

a plurality of condition control means for individually outputting operation signals, using as a control deviation the deviation of information indicating said gradation or the deviation of information indicating the representative obtained from said converting means; and

a distribution means for distributing the operation signals transmitted from said plurality of condition control means to a plurality of operating means for operating said processing means so that control of each of said plurality of condition control means may produce less effect on control of another condition control means.

10. A controller according to claim 6 further comprising a limiting means which is disposed in the former stage of said distribution means and limits the operation signals from at least one of said plurality of condition control means.

14. A controller according to claim 6 further comprising further comprising a tuning means for tuning a balance in condition control between the condition control means which outputs an operation signal using the deviation of the information indicating said gradient as the control deviation, and the condition control means which outputs an operation signal using the deviation of the information indicating said representative as the control deviation.

18. A controller according claim 6, wherein a coefficient of transmission (transmission function) is previously found to determine a distribution ratio used in said distribution means by measuring changes in the detection information of said detecting means by changing the operation signals of said plurality of condition control means.

19. A temperature regulator comprising:

a converting means for converting detection temperatures obtained from a plurality of temperature detecting means for individually detecting temperatures of a control target into gradient temperatures based on the plural detection temperatures and a representative temperature;

a plurality of temperature control means for outputting operation signals, using the gradient temperatures or the representative temperature obtained from said converting means as the amount of control; and

a distribution means for distributing the operation signals transmitted from said each of temperature control means to a plurality of operating means for changing the temperatures of said control target so that control of each of the plurality of temperature control means may produce less effect on control of another temperature control means.

30. A temperature regulator according to claim 19 further comprising a limiter which is disposed in the former stage of said distribution means and limits the operation signals from at least one of said temperature control means.

35. A temperature regulator according to claim 19 further comprising a tuning means for tuning a balance in temperature control between the temperature control means which outputs an operation signal, using said gradient temperatures as the amount of control, and the temperature control means which outputs an operation signal, using said representative temperature as the amount of control.

40. A temperature regulator according to claim 35, wherein said tuning means adjusts at least either of the limiter for limiting the operation signals and a control parameter of said temperature control means according to a setting.

45. A temperature regulator according to claim 19, wherein a coefficient of transmission (transmission function) is previously found to determine a distribution ratio used in said distribution means by measuring changes in the detection temperatures of said each of temperature detecting means by changing the operation signals of said each of temperature control means.

50. A temperature regulator according to claim 45, wherein the operation signals of said each of temperature control means are changed sequentially so as to measure changes in the detection temperatures of said each of temperature detecting means.

55. A temperature regulator according to claim 50, wherein said coefficient of transmission (transmission function) is found by using step response or limit cycle.

60. A temperature regulator according to claim 19, wherein said representative temperature is an average temperature based on the plural detection temperatures, and said gradient temperature is a difference between the detection temperature of the temperature detecting means in one group, and the detection temperature of the temperature detecting means in the other group when said plurality of temperature detecting means are divided into two groups.

65. A temperature regulator according to claim 60, wherein said plurality of temperature control means individually output operation signals while inputting the control deviation between said average temperature and the target average temperature or the control deviation between said gradient temperature and the target gradient temperature, and a temperature control means which inputs the control deviation between the gradient temperature and the target gradient temperature, is made to have a larger amplitude than a temperature control means which inputs the control deviation between said average temperature and the target average temperature.

70. A temperature regulator according to claim 19 further comprising a correcting means for correcting control parameters of said temperature control means, based on said representative temperature or the target representative temperature.

73. A temperature regulator according to claim 19 further comprising a break detecting means for detecting a break in detection signal lines of said plurality of temperature detecting means.

75. A temperature regulator according to claim 19 further comprising a target temperature converting means for converting target temperatures individualistically corresponding to said plurality of temperature detecting means into target representative temperatures and target gradient temperatures.

20. A temperature regulator comprising:

a converting means for converting a temperature deviation between detection temperatures obtained from a plurality of temperature detecting means for individually detecting temperatures of a control target and plural target temperatures individualistically corresponding to said plurality of temperature detecting means into a deviation of gradient temperatures and a deviation of a representative temperature;

a plurality of temperature control means for individually outputting operation signals, using the deviation of the gradient temperatures or the deviation of the representative temperature obtained from said converting means as a control deviation; and

a distribution means for distributing the operation signals obtained from said each of temperature control means to a plurality of operating means for changing the temperatures of said control target so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.

31. A temperature regulator according to claim 20 further comprising a limiter which is disposed in the former stage of said distribution means and limits the operation signals from at least one of said temperature control means.

36. A temperature regulator according to claim 20 further comprising a tuning means for tuning a balance in temperature control between the temperature control means which is given the deviation of said gradient temperatures and the temperature control means which is given the deviation of said representative temperature.

41. A temperature regulator according to claim 36, wherein said tuning means adjusts at least either of the limiter for limiting the operation signals and a control parameter of said temperature control means according to a setting.

46. A temperature regulator according to claim 20, wherein a coefficient of transmission (transmission function) is previously found to determine a distribution ratio used in said distribution means by measuring changes in the detection temperatures of said each of temperature detecting means by changing the operation signals of said each of temperature control means.

51. A temperature regulator according to claim 46, wherein the operation signals of said each of temperature control means are changed sequentially so as to measure changes in the detection temperatures of said each of temperature detecting means.

56. A temperature regulator according to claim 51, wherein said coefficient of transmission (transmission function) is found by using step response or limit cycle.

61. A temperature regulator according to claim 20, wherein said representative temperature is an average temperature based on the plural detection temperatures, and said gradient temperature is a difference between the detection temperature of the temperature detecting means in one group, and the detection temperature of the temperature detecting means in the other group when said plurality of temperature detecting means are divided into two groups.

66. A temperature regulator according to claim 61, wherein a temperature control means which outputs the operation signal, using the deviation of the gradient temperature as the control deviation is made to have a larger amplitude than a temperature control means which outputs the operation signal, using the deviation of the average temperature that is the representative temperature as the control deviation.

74. A temperature regulator according to claim 20 further comprising a break detecting means for detecting a break in detection signal lines of said plurality of temperature detecting means.

21. A temperature regulator comprising:

a plurality of temperature control means for individually outputting operation signals to a plurality of operating means individualistically corresponding to said temperature control means, based on each of temperature deviations between plural detection temperatures obtained from the plurality of temperature detecting means for individually detecting temperatures of a control target and plural target temperatures; and

at least one interference-reducing control means for outputting, based on the temperature deviation corresponding to one of said temperature detecting means, an operation signal to one of the plurality of operating means that does not correspond to the one of said temperature detecting means.

22. A temperature regulator according to claim 21, wherein

said plurality of temperature control means and the interference-reducing control means function as:

a converting means for converting each temperature deviation between said plural detection temperatures and the plural target temperatures into a deviation of the gradient temperatures and a deviation of a representative temperature;

a plurality of temperature control means for individually outputting operation signals, based on the deviation of the gradient temperatures or the deviation of the representative temperature obtained from said converting means; and

a distribution means for distributing the operation signals transmitted from said each of temperature control means to a plurality of operating means for changing the temperatures of said control target so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.

23. A temperature regulator comprising:

a temperature estimating means for estimating temperatures of an object to be processed and outputting plural estimation temperatures, based on detection temperatures obtained from a plurality of temperature detecting means for individually detecting temperatures of a heat treating means for heat-treating said object;

a converting means for converting the plural estimation temperatures estimated by said temperature estimating means into gradient temperatures and a typical representative temperature based on the plural estimation temperatures;

a plurality of temperature control means for individually outputting operation signals, using the gradient temperatures or the representative temperature obtained from said converting means as the amount of control; and

a distribution means for distributing the operation signals transmitted from said plurality of temperature control means to a plurality of operating means for changing the temperature of said heat treating means so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.

27. A temperature regulator according to claim 23 further comprising a disturbance estimating means for estimating an influence degree of disturbance to correct said detection temperatures of said temperature detecting means or the estimation temperatures of said temperature estimating means.

32. A temperature regulator according to claim 23 further comprising a limiter which is disposed in the former stage of said distribution means and limits the operation signals from at least one of said temperature control means.

37. A temperature regulator according to claim 23 further comprising a tuning means for tuning a balance in temperature control between the temperature control means which outputs an operation signal, using said gradient temperatures as the amount of control, and the temperature control means which outputs an operation signal, using said representative temperature as the amount of control.

42. A temperature regulator according to claim 37, wherein said tuning means adjusts at least either of the limiter for limiting the operation signals and a control parameter of said temperature control means according to a setting.

47. A temperature regulator of claim 23, wherein a coefficient of transmission (transmission function) is previously found to determine a distribution ratio used in said distribution means by measuring changes in the detection temperatures of said each of temperature detecting means by changing the operation signals of said each of temperature control means.

52. A temperature regulator according to claim 47, wherein the operation signals of said each of temperature control means are changed sequentially so as to measure changes in the detection temperatures of said each of temperature detecting means.

57. A temperature regulator according to claim 52, wherein the coefficient of transmission (transmission function) is found by using step response or limit cycle.

62. A temperature regulator according to claim 23, wherein said representative temperature is an average temperature based on the plural estimation temperatures, and said gradient temperature is a difference between the estimation temperatures corresponding to the detection temperatures of the temperature detecting means in one group, and the estimation temperatures corresponding to the detection temperatures of the temperature detecting means in the other group when said plurality of temperature detecting means are divided into two groups.

67. A temperature regulator according to claim 62, wherein a temperature control means which outputs the operation signal, using the gradient temperature as the amount of control is made to have a larger amplitude than a temperature control means which outputs the operation signal, using the average temperature that is the representative temperature as the amount of control.

71. A temperature regulator according to claim 23 further comprising a correcting means for correcting control parameters of said temperature control means, based on said representative temperature or the target representative temperature.

24. A temperature regulator comprising:

a converting means for converting detection temperatures obtained from a plurality of temperature detecting means for individually detecting temperatures of a heat treating means for heat-treating an object to be processed into gradient temperatures and a typical representative temperature based on the plural detection temperatures;

a temperature estimating means for estimating the gradient temperatures and the representative temperature corresponding to said object, based on said gradient temperatures and the representative temperature;

a plurality of temperature control means for individually outputting operation signals, using said gradient temperatures or the representative temperature estimated by said temperature estimating means as the amount of control; and

a distribution means for distributing the operation signals transmitted from said plurality of temperature control means to a plurality of operating means for changing the temperatures of said heat treating means so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.

26. A temperature regulator according to claim 24, wherein

said temperature estimating means estimates at least part of the gradient temperatures and the representative temperature corresponding to said object to be processed, based on part of said gradient temperatures and the representative temperature converted by said converting means, and

as for the gradient temperatures and the representative temperature not estimated by said temperature estimation measures, the gradient temperatures obtained from the converting means or an average temperature can be given to said temperature control means.

28. A temperature regulator according to claim 24 further comprising a disturbance estimating means for estimating an influence degree of disturbance to correct said detection temperatures of said temperature detecting means or the estimation temperatures of said temperature estimating means.

33. A temperature regulator according to claim 24 further comprising a limiter which is disposed in the former stage of said distribution means and limits the operation signals from at least one of said temperature control means.

38. A temperature regulator according to claim 24 further comprising a tuning means for tuning a balance in temperature control between the temperature control means which outputs an operation signal, using said gradient temperatures as the amount of control, and the temperature control means which outputs an operation signal, using said representative temperature as the amount of control.

43. A temperature regulator according to claim 38, wherein said tuning means adjusts at least either of the limiter for limiting the operation signals and a control parameter of said temperature control means according to a setting.

48. A temperature regulator according to claim 24, wherein a coefficient of transmission (transmission function) is previously found to determine a distribution ratio used in said distribution means by measuring changes in the detection temperatures of said each of temperature detecting means by changing the operation signals of said each of temperature control means.

53. A temperature regulator according to claim 48, wherein the operation signals of said each of temperature control means are changed sequentially so as to measure changes in the detection temperatures of said each of temperature detecting means.

58. A temperature regulator of claim 53, wherein said coefficient of transmission (transmission function) is found by using step response or limit cycle.

63. A temperature regulator according to claim 24, wherein said representative temperature is an average temperature based on the plural detection temperatures, and said gradient temperature is a difference between the detection temperature of the temperature detecting means in one group, and the detection temperature of the temperature detecting means in the other group when said plurality of temperature detecting means are divided into two groups.

68. A temperature regulator according to claim 63, wherein a temperature control means which outputs the operation signal, using the gradient temperature as the amount of control is made to have a larger amplitude than a temperature control means which outputs the operation signal, using the average temperature that is the representative temperature as the amount of control.

72. A temperature regulator according to claim 24 further comprising a correcting means for correcting control parameters of said temperature control means, based on said representative temperature or the target representative temperature.

25. A temperature regulator comprising:

a temperature estimating means for estimating temperatures of an object to be processed and outputting plural estimation temperatures, based on detection temperatures obtained from a plurality of temperature detecting means for individually detecting temperatures of a heat treating means for heat-treating said object;

a converting means for converting a deviation between plural estimation temperatures estimated by said temperature estimating means and plural target temperatures into a deviation of gradient temperatures and a deviation of a typical representative temperature;

a plurality of temperature control means for individually outputting operation signals, using the deviation of the gradient temperatures or the deviation of said representative temperature obtained from said converting means as a control deviation; and

a distribution means for distributing the operation signals transmitted from said each of temperature control means to a plurality of operating means for operating said heat treating means so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.

29. A temperature regulator according to claim 25 further comprising a disturbance estimating means for estimating an influence degree of disturbance to correct said detection temperatures of said temperature detecting means or the estimation temperatures of said temperature estimating means.

34. A temperature regulator according to claim 25 further comprising a limiter which is disposed in the former stage of said distribution means and limits the operation signals from at least one of said temperature control means.

39. A temperature regulator according to claim 25 further comprising a tuning means for tuning a balance in temperature control between the temperature control means which outputs an operation signal, using the deviation of said gradient temperatures as a control deviation, and the temperature control means which outputs an operation signal, using the deviation of said representative temperature as the control deviation.

44. A temperature regulator according to claim 39, wherein said tuning means adjusts at least either of the limiter for limiting the operation signals and a control parameter of said temperature control means according to a setting.

49. A temperature regulator according to claim 25, wherein a coefficient of transmission (transmission function) is previously found to determine a distribution ratio used in said distribution means by measuring changes in the detection temperatures of said each of temperature detecting means by changing the operation signals of said each of temperature control means.

54. A temperature regulator according to claim 49, wherein the operation signals of said each of temperature control means are changed sequentially so as to measure changes in the detection temperatures of said each of temperature detecting means.

59. A temperature regulator according to claim 54, wherein said coefficient of transmission (transmission function) is found by using step response or limit cycle.

64. A temperature regulator according to claim 25, wherein said representative temperature is an average temperature based on the plural estimation temperatures, and said gradient temperature is a difference between the estimation temperatures corresponding to the detection temperatures of the temperature detecting means in one group, and the estimation temperatures corresponding to the detection temperatures of the temperature detecting means in the other group when said plurality of temperature detecting means are divided into two groups.

69. A temperature regulator according to claim 64, wherein a temperature control means which outputs the operation signal, using the deviation of the gradient temperature as the control deviation is made to have a larger amplitude than a temperature control means which outputs the operation signal, using the deviation of the average temperature that is the representative temperature as the control deviation.

76. A heat treatment apparatus comprising:

a heat treating means;

a plurality of temperature detecting means for detecting temperatures of said heat treating means;

a plurality of operating means for changing the temperatures of said heat treating means; and

a temperature regulator, wherein

said temperature regulator comprises;

a converting means for converting detection temperatures obtained from said plurality of temperature detecting means into gradient temperatures based on plural detection temperatures and a typical representative temperature;

a plurality of temperature control means for individually outputting operation signals using the gradient temperatures or the representative temperature obtained from said converting means as the amount of control; and

a distribution means for distributing the operation signals from said each of temperature control means into said plurality of operating means so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.

77. A heat treatment apparatus comprising:

a heat treating means;

a plurality of temperature detecting means for detecting temperatures of said heat treating means;

a plurality of operating means for changing the temperatures of said heat treating means; and

a temperature regulator, wherein

said temperature regulator comprises;

a converting means for converting a temperature deviation between detection temperatures obtained from said plurality of temperature detecting means and plural target temperatures individualistically corresponding to said plurality of temperature detecting means into a deviation of gradient temperatures and a deviation of a typical representative temperature;

a plurality of temperature control means for individually outputting operation signals, using the deviation of the gradient temperatures or the deviation of the representative temperature obtained from said converting means as a control deviation; and

a distribution means for distributing the operation signals from said each of temperature control means into said plurality of operating means so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.

78. A heat treatment apparatus comprising:

a heat treating means;

a plurality of temperature detecting means for detecting temperatures of said heat treating means;

a plurality of operating means for changing the temperatures of said heat treating means; and

a temperature regulator, wherein

said temperature regulator comprises;

a plurality of temperature control means for individually outputting operation signals to said plurality of operating means individualistically corresponding to said temperature detecting means, based on temperature deviations between plural detection temperatures obtained from said plurality of temperature detecting means and plural target temperatures; and

at least one interference-reducing control means for outputting an operation signal, based on the temperature deviation corresponding to one of said temperature detecting means, to one of said plurality of operating means that does not correspond to said one of said temperature detecting means.

79. A heat treatment apparatus according to claim 78, wherein

said plurality of temperature control means and said interference-reducing control means of said temperature regulator function as:

a converting means for converting each temperature deviation between said plural detection temperatures and the plural target temperatures into a deviation of gradient temperatures and a deviation of a representative temperature;

a plurality of temperature control means for individually outputting operation signals, based on the deviation of the gradient temperatures or the deviation of the representative temperature obtained from said converting means; and

a distribution means for distributing the operation signals transmitted from said each of temperature control means to said plurality of operating means so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.

80. A heat treatment apparatus comprising:

a heat treating means for heat-treating an object to be processed;

a plurality of operating means for changing temperatures of said heat treating means;

a plurality of temperature detecting means for detecting the temperatures of said heat treating means; and

a temperature regulator, wherein

said temperature regulator comprises;

a temperature estimating means for estimating temperatures of said object and outputting plural estimation temperatures, based on detection temperatures obtained from said plurality of temperature detecting means;

a converting means for converting the plural estimation temperatures estimated by said temperature estimating means into gradient temperatures and a typical representative temperature based on the plural estimation temperatures;

a plurality of temperature control means for individually outputting operation signals, using the gradient temperatures or the representative temperature obtained from said converting means as the amount of control; and

a distribution means for distributing the operation signals transmitted from said each of temperature control means to said plurality of operating means so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.

81. A heat treatment apparatus comprising:

a heat treating means for heat-treating an object to be processed;

a plurality of operating means for changing temperatures of said heat treating means;

a plurality of temperature detecting means for detecting the temperatures of said heat treating means; and

a temperature regulator, wherein

said temperature regulator comprises;

a converting means for converting detection temperatures obtained from said plurality of temperature detecting means into gradient temperatures and a representative temperature based on the plural detection temperatures;

a temperature estimating means for estimating the gradient temperatures and the representative temperature corresponding to said object, based on said gradient temperatures and the representative temperature;

a plurality of temperature control means for individually outputting operation signals, using said gradient temperatures or the representative temperature estimated by said temperature estimating means as the amount of control; and

a distribution means for distributing the operation signals transmitted from said plurality of temperature control means to said plurality of operating means so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.

82. A heat treatment apparatus comprising:

a heat treating means for heat-treating an object to be processed;

a plurality of operating means for changing temperatures of said heat treating means;

a plurality of temperature detecting means for detecting the temperatures of said heat treating means; and

a temperature regulator, wherein

said temperature regulator comprises;

a temperature estimating means for estimating temperatures of said object and outputting plural estimation temperatures, based on the detection temperatures obtained from said plurality of temperature detecting means;

a converting means for converting a deviation between plural estimation temperatures estimated by said temperature estimating means and plural target temperatures into a deviation of gradient temperatures and a deviation of a typical representative temperature;

a plurality of temperature control means for individually outputting operation signals, using the deviation of the gradient temperatures or the deviation of the representative temperature obtained from said converting means as a control deviation; and

a distribution means for distributing the operation signals transmitted from said each of temperature control means to said plurality of operating means so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means. into gradient temperatures and a representative temperature based on the plural detection temperatures;

a temperature estimating means for estimating the gradient temperatures and the representative temperature corresponding to said object, based on said gradient temperatures and the representative temperature;

a plurality of temperature control means for individually outputting operation signals, using said gradient temperatures or the representative temperature estimated by said temperature estimating means as the amount of control; and

a distribution means for distributing the operation signals transmitted from said plurality of temperature control means to said plurality of operating means so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.

82-1. A heat treatment apparatus comprising:

a heat treating means for heat-treating an object to be processed;

a plurality of operating means for changing temperatures of said heat treating means;

a plurality of temperature detecting means for detecting the temperatures of said heat treating means; and

a temperature regulator, wherein

said temperature regulator comprises;

a temperature estimating means for estimating temperatures of said object and outputting plural estimation temperatures, based on the detection temperatures obtained from said plurality of temperature detecting means;

a converting means for converting a deviation between plural estimation temperatures estimated by said temperature estimating means and plural target temperatures into a deviation of gradient temperatures and a deviation of a typical representative temperature;

a plurality of temperature control means for individually outputting operation signals, using the deviation of the gradient temperatures or the deviation of the representative temperature obtained from said converting means as a control deviation; and

a distribution means for distributing the operation signals transmitted from said each of temperature control means to said plurality of operating means so that control of each of said plurality of temperature control means may produce less effect on control of another temperature control means.