Valve assembly

• US 20030122099A1
• Filed: 08/26/2002
• Published: 07/03/2003
• Est. Priority Date: 12/31/2001
• Status: Abandoned Application

• Current Assignee: Applied Films Taiwan Co. Ltd. (Applied Materials Incorporated)
• Original Assignee: Helix Technology Incorporated
• Inventors: Huang, Yung-Chao, Weng, Pin-Fu, Chen, Yu-Yao, Yang, Chi-Chang
• Application Number:
  US10/228,803
• Publication Number:
  US 20030122099A1
• Time in Patent Office: Days
• US Class Current: 251/301
• CPC Class Codes: F16K 1/2028 Details of bearings for the axis of rotation
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

In a valve assembly, a main frame unit has an inner space defined by opposite side walls connected respectively to lateral walls of adjacent chambers, front and rear walls connected between the side walls, and top and bottom walls disposed on opposing top and bottom ends of the front and rear walls. Each side wall is formed with an access hole for passage of a workpiece into and out of the inner space. The rear wall is formed with a through hole and is mounted detachably with a cover plate for closing the through hole. A valve unit is disposed in the inner space and is movable so as to close the access hole in one of the side walls. A drive unit has a rotary axle disposed rotatably in the inner space and coupled to the valve unit to control closing movement of the valve unit.

Claims

1. A valve assembly adapted to be installed between an adjacent pair of chambers so as to control fluid communication between the chambers, the chambers having confronting lateral walls, each of which is formed with an opening for passage of a workpiece from one of the chambers to the other of the chambers, said valve assembly comprising:

a main frame unit having opposite first and second side walls, each of which is adapted to be connected to a respective one of the lateral walls of the adjacent pair of the chambers, upright front and rear walls connected between said first and second side walls, and top and bottom walls disposed on opposing top and bottom ends of said front and rear walls, said first and second side walls;

said front and rear walls, and said top and bottom walls cooperating to define an inner space, each of said first and second side walls being formed with an access hole adapted for passage of the workpiece into and out of said inner space, one of said front and rear walls being formed with a through hole;

a cover plate mounted detachably on said one of said front and rear walls for closing said through hole;

a valve unit disposed in said inner space and movable so as to close said access hole in one of said first and second side walls; and

a drive unit mounted on said main frame unit and having a rotary axle that is disposed rotatably in said inner space and that is coupled to said valve unit to control closing movement of said valve unit.

2. The valve assembly as claimed in claim 1, further comprising a seal unit provided around said access hole in said one of said first and second side walls and between said valve unit and said one of said first and second side walls to ensure sealing engagement between said valve unit and said one of said first and second side walls when said valve unit closes said access hole in said one of said first and second side walls.

3. The valve assembly as claimed in claim 1, further comprising a seal unit provided around said access hole in one of said first and second side walls and adapted to ensure sealing engagement between said one of said first and second side walls and the respective one of the lateral walls of the chambers.

4. The valve assembly as claimed in claim 1, wherein said drive unit includes a rotary drive member mounted on said bottom wall and driving rotatably said rotary axle.

5. The valve assembly as claimed in claim 4, further comprising an upper bearing unit for mounting rotatably said valve unit on said top wall, and a lower bearing unit for mounting rotatably said rotary axle on said bottom wall.

6. The valve assembly as claimed in claim 5, wherein said valve unit includes a main valve seat extending between said top and bottom walls and having upper and lower ends, and a pressing block connected to said main valve seat for abutting against said one of said first and second side walls to close said access hole in said one of said first and second side walls, said upper end of said main valve seat being coupled to said upper bearing unit, said lower end of said main valve seat being coupled to said rotary axle.

7. The valve assembly as claimed in claim 6, wherein said valve unit further includes a biasing member mounted between said main valve seat and said pressing block for biasing said pressing block to contact tightly said one of said first and second side walls when said pressing block closes said access hole in said one of said first and second side walls.

8. The valve assembly as claimed in claim 4, wherein said rotary drive member includes a rotary cylinder.

9. The valve assembly as claimed in claim 1, wherein said cover plate is formed with a viewing hole that is registered with said through hole in said one of said front and rear walls, said valve assembly further comprising a transparent panel mounted on said cover plate to close said viewing hole.