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Optical spot grid array printer

  • US 20030123040A1
  • Filed: 11/07/2002
  • Published: 07/03/2003
  • Est. Priority Date: 11/07/2001
  • Status: Active Grant
First Claim
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1. A printer adapted for use with a substrate layered with a memoryless resist, the printer comprising:

  • a programmable optical radiation source for providing an array of substantially parallel optical beams, the optical beams individually modulated in response to the input signal;

    a beam shaper for narrowing the optical beams;

    focusing optics positioned to receive the narrowed modulated optical beams and for focusing the narrowed modulated optical beams; and

    a movable stage for introducing a linear movement between the substrate and the focused narrowed modulated optical beams, the translation providing for a slanted scan.

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