Stage device and exposure apparatus

• US 20030123041A1
• Filed: 12/09/2002
• Published: 07/03/2003
• Est. Priority Date: 12/01/1999
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Tanaka, Keiichi
• Granted Patent: US 6,819,404 B2
• Time in Patent Office: Days
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving

Abstract

A stage device includes a first stationary member, a second stationary member, a moving member and positioning devices. The first stationary member extends in a first direction. The second stationary member extends in the first direction and is spaced apart from the first stationary member in a second direction perpendicular to the first direction. The moving member can cooperate with the first stationary member and with the second stationary member. The positioning devices selectively position the moving member into cooperation with one of the first and second stationary members without physically contacting the moving member with the first and second stationary members. In addition, a stage device provided with a moving member that can move within a two-dimensional plane having a first direction and a second direction perpendicular to the first direction includes a first stationary member and a second stationary member. The first stationary member extends in the first direction and is supported at a first position in a third direction that is perpendicular to the two-dimensional plane. The second stationary member extends in the first direction and is supported at a second position in the third direction, different from the first position. The moving member has a first part that can cooperate with the first stationary member, and a second part that can cooperate with the second stationary member. When two stages are replaced, generation of a positional shift on an object on the stages is prevented, and separate processing can be performed simultaneously with respect to objects on the stages.

Claims

1. A stage device comprising:

a first stationary member extending in a first direction;

a second stationary member extending in the first direction and spaced apart from the first stationary member in a second direction that is perpendicular to the first direction;

a moving member that can cooperate with the first stationary member and with the second stationary member; and

a positioning device that positions the moving member at a position where the moving member can selectively cooperate with the first stationary member and with the second stationary member without the moving member physically contacting the first stationary member and the second stationary member.

2. The stage device as set forth in claim 1, wherein the moving member can cooperate with the first stationary member while not cooperating with the second stationary member, and alternatively can cooperate with the second stationary member while not cooperating with the first stationary member.

3. The stage device as set forth in claim 1, wherein the first stationary member and the second stationary member are movable in the second direction.

4. The stage device as set forth in claim 3, wherein the first stationary member and the second stationary member are movable to respective replacement positions at which cooperation of the moving member can be exchanged between the first stationary member and the second stationary member.

5. The stage device as set forth in claim 1, further comprising:

a first driver associated with the first stationary member to drive the moving member along the first stationary member in the first direction when the moving member is in cooperation with the first stationary member; and

a second driver associated with the second stationary member to drive the moving member along the second stationary member in the first direction when the moving member is in cooperation with the second stationary member.

6. The stage device as set forth in claim 1, wherein the moving member includes a first part that can cooperate with the first stationary member, and a second part that can cooperate with the second stationary member.

7. The stage device as set forth in claim 6, wherein:

the first part of the moving member is located at a first position in a third direction that is perpendicular to a plane defined by the first and second directions; and

the second part of the moving member is located at a second position in the third direction, different from the first position.

8. An exposure apparatus that transfers an image of a pattern onto a substrate, the exposure apparatus comprising:

a projection system that projects the image onto the substrate; and

the stage device as set forth in claim 1, wherein the substrate is mounted on the moving member of the stage device.

9. A stage device comprising:

a moving member that is movable within a two-dimensional plane that extends in a first direction and in a second direction that is perpendicular to the first direction;

a first stationary member that extends in the first direction and that is disposed at a first position in a third direction perpendicular to the two-dimensional plane;

a second stationary member that extends in the first direction and that is disposed at a second position in the third direction, which is different from the first position;

the moving member has a first part that can cooperate with the first stationary member, and a second part that can cooperate with the second stationary member.

10. The stage device as set forth in claim 9, further comprising a driver that drives the moving member and one of the first and second stationary members in the second direction while the moving member cooperates with the one of the first and second stationary members.

11. The stage device as set forth in claim 9, wherein:

the first part of the moving member cooperates with the first stationary member without physically contacting the moving member with the first stationary member; and

the second part of the moving member cooperates with the second stationary member without physically contacting the moving member with the second stationary member.

12. The stage device as set forth in claim 9, wherein the first stationary member and the second stationary member are movable in the second direction.

13. The stage device as set forth in claim 12, wherein the first stationary member and the second stationary member are movable to respective replacement positions at which cooperation of the moving member can be exchanged between the first stationary member and the second stationary member.

14. An exposure apparatus that transfers an image of a pattern onto a substrate, the exposure apparatus comprising:

a projection system that projects the image onto the substrate; and

the stage device as set forth in claim 9, wherein the substrate is mounted on the moving member of the stage device.

15. A stage device comprising:

a first stationary side member having a first stationary member extending in a first direction;

a second stationary side member having a second stationary member extending in the first direction and that is spaced apart from the first stationary member in a second direction that is perpendicular to the first direction;

a first stage having a first moving member that can cooperate with the first stationary member and with the second stationary member to receive a thrust in the first direction;

a second stage having a second moving member that can cooperate with the first stationary member and with the second stationary member to receive a thrust in the first direction; and

a replacer that replaces the first and second stages with respect to the first and second stationary side members without causing the first and second stages to physically contact the first and second stationary side members.

16. The stage device as set forth in claim 15, wherein the replacer includes:

a first driver that drives the first stationary side member in the second direction; and

a second driver that drives the second stationary side member in the second direction.

17. The stage device as set forth in claim 16, wherein the replacer includes an adjuster that adjusts an interval in the second direction between the first stationary side member and the first moving member.

18. The stage device as set forth in claim 17, wherein a plurality of the adjusters are arranged in the first direction.

19. The stage device as set forth in claim 18, wherein the adjuster includes electromagnets disposed in the first moving member and a magnetic body member disposed in the first stationary side member.

20. The stage device as set forth in claim 17, wherein the adjuster includes electromagnets disposed in the first moving member and a magnetic body member disposed in the first stationary side member.

21. The stage device as set forth in claim 15, wherein the replacer includes an adjuster that adjusts an interval in the second direction between the first stationary side member and the first moving member.

22. The stage device as set forth in claim 21, wherein a plurality of the adjusters are arranged in the first direction.

23. The stage device as set forth in claim 21, wherein the adjuster includes electromagnets disposed in the first moving member and a magnetic body member disposed in the first stationary side member.

24. The stage device as set forth in claim 15, wherein an acting point of thrust in the first direction with respect to the first and second stages extends through a position of a center of gravity of the first and second stages.

25. An exposure apparatus that transfers an image of a pattern onto a substrate, the exposure apparatus comprising:

a projection system that projects the image onto the substrate; and

the stage device as set forth in claim 15, wherein the substrate is mounted on one of the first and second stages of the stage device.

26. A stage device comprising:

first and second stages that can move independently within a two-dimensional plane extending a first direction and in a second direction perpendicular to the first direction;

a first stationary member extending in the first direction and disposed at a first position in a third direction that is perpendicular to the two-dimensional plane;

a second stationary member extending in the first direction and disposed at a second position in the third direction, which is different from the first position;

the first stage includes a first moving member having a first part that can cooperate with the first stationary member and a second part that can cooperate with the second stationary member; and

the second stage includes a second moving member having a first part that can cooperate with the first stationary member and a second part that can cooperate with the second stationary member.

27. The stage device as set forth in claim 26, further comprising:

a first driver that drives one of the first and second stages and the first stationary member in the second direction while the one of the first and second stages cooperates with the first stationary member; and

a second driver that drives the other one of the first and second stages and the second stationary member in the second direction while the other one of the first and second stages cooperates with the second stationary member.

28. The stage device as set forth in claim 26, wherein:

the first part of the first stage and the first part of the second stage cooperate with the first stationary member without physically contacting the first and second stages with the first stationary member; and

the second part of the first stage and the second part of the second stage cooperate with the second stationary member without physically contacting the first and second stages with the second stationary member.

29. The stage device as set forth in claim 26, wherein the first stationary member and the second stationary member are movable in the second direction.

30. The stage device as set forth in claim 29, wherein the first stationary member and the second stationary member are movable to respective replacement positions at which cooperation of the first and second stages can be exchanged between the first stationary member and the second stationary member.

31. An exposure apparatus that transfers an image of a pattern onto a substrate, the exposure apparatus comprising:

a projection system that projects the image onto the substrate; and

the stage device as set forth in claim 26, wherein the substrate is mounted on one of the first and second stages of the stage device.

32. A method of operating a stage device that includes a first stationary member extending in a first direction, a second stationary member extending in the first direction and spaced apart from the first stationary member in a second direction that is perpendicular to the first direction, and a moving member that can cooperate with the first stationary member and with the second stationary member, the method comprising the steps of:

positioning the moving member at a position where the moving member can selectively cooperate with the first stationary member and with the second stationary member without the moving member physically contacting the first stationary member and the second stationary member; and

causing the moving member to cooperate with at least one of the first and second stationary members without the moving member physically contacting the first stationary member and the second stationary member.

33. The method as set forth in claim 32, wherein the causing step includes one of:

causing the moving member to cooperate with the first stationary member while not cooperating with the second stationary member; and

causing the moving member to cooperate with the second stationary member while not cooperating with the first stationary member.

34. The method as set forth in claim 32, wherein the first stationary member and the second stationary member are movable in the second direction.

35. The method as set forth in claim 34, further comprising the step of moving the first stationary member and the second stationary member to respective replacement positions at which cooperation of the moving member can be exchanged between the first stationary member and the second stationary member.

36. The method as set forth in claim 32, further comprising:

driving the moving member along the first stationary member in the first direction when the moving member is in cooperation with the first stationary member; and

driving the moving member along the second stationary member in the first direction when the moving member is in cooperation with the second stationary member.

37. A method of transferring an image of a pattern onto a substrate, the method comprising the steps of:

projecting the image onto the substrate with a projection system; and

mounting the substrate on the moving member operated as set forth in claim 32 during the projecting step.

38. A method of making a stage device, the method comprising the steps of:

providing a moving member that is movable within a two-dimensional plane that extends in a first direction and in a second direction that is perpendicular to the first direction;

disposing a first stationary member that extends in the first direction at a first position in a third direction perpendicular to the two-dimensional plane;

disposing a second stationary member that extends in the first direction at a second position in the third direction, which is different from the first position; and

providing the moving member with a first part that can cooperate with the first stationary member, and with a second part that can cooperate with the second stationary member.

39. The method as set forth in claim 38, further comprising the step of providing a driver that drives the moving member and one of the first and second stationary members in the second direction while the moving member cooperates with the one of the first and second stationary members.

40. A method of operating a stage device including a first stationary side member having a first stationary member extending in a first direction, a second stationary side member having a second stationary member extending in the first direction and that is spaced apart from the first stationary member in a second direction that is perpendicular to the first direction, a first stage having a first moving member that can cooperate with the first stationary member and with the second stationary member to receive a thrust in the first direction, and a second stage having a second moving member that can cooperate with the first stationary member and with the second stationary member to receive a thrust in the first direction, the method comprising the step of:

replacing the first and second stages with respect to the first and second stationary side members without causing the first and second stages to physically contact the first and second stationary side members.

41. The method as set forth in claim 40, wherein the replacing step includes:

a first sub-step of driving the first stationary side member in the second direction; and

a second sub-step of driving the second stationary side member in the second direction.

42. The method as set forth in claim 41, further comprising the step of adjusting an interval in the second direction between the first stationary side member and the first moving member.

43. The method as set forth in claim 40, further comprising the step of adjusting an interval in the second direction between the first stationary side member and the first moving member.

44. A method of transferring an image of a pattern onto a substrate, comprising the steps of:

projecting the image onto the substrate with a projection system; and

mounting the substrate on one of the first and second stages operated as set forth in claim 40.

45. A method of making a stage device comprising the steps of:

providing first and second stages that can move independently within a two-dimensional plane extending a first direction and in a second direction perpendicular to the first direction;

disposing a first stationary member extending in the first direction at a first position in a third direction that is perpendicular to the two-dimensional plane;

disposing a second stationary member extending in the first direction at a second position in the third direction, which is different from the first position;

providing the first stage with a first moving member having a first part that can cooperate with the first stationary member and a second part that can cooperate with the second stationary member; and

providing the second stage with a second moving member having a first part that can cooperate with the first stationary member and a second part that can cooperate with the second stationary member.

46. The method as set forth in claim 45, further comprising the steps of:

providing a first driver that drives one of the first and second stages and the first stationary member in the second direction while the one of the first and second stages cooperates with the first stationary member; and

providing a second driver that drives the other one of the first and second stages and the second stationary member in the second direction while the other one of the first and second stages cooperates with the second stationary member.