Electrostatic chuck and manufacturing method therefor
First Claim
Patent Images
1. An electrostatic chuck comprising:
- a first insulating member whose one principal plane serves as a mounting surface on which a plate specimen is mounted;
a second insulating member, which is positioned facing an other principal plane of said first insulating member; and
an internal electrode located between said first insulating member and said second insulating member, wherein said first insulating member is formed from a composite ceramic having as its main constituents 1 wt % to 4 wt % of silicon carbide, and aluminum oxide, with a volume resistivity value in a temperature range of −
200°
C. to 200°
C., of 1×
1014 Ω
cm to 1×
1016 Ω
cm.
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Accused Products
Abstract
An electrostatic chuck of the invention comprising; a first insulating member whose upper surface serves as a mounting surface on which a plate specimen is mounted, a second insulating member which is positioned facing a lower surface side of the first insulating member, and an internal electrode located between the first insulating member and the second insulating member, wherein the first insulating member is a composite ceramic having as its main constituents 1 wt % to 4 wt % of silicon carbide, and aluminum oxide, with a volume resistivity value in a temperature range of −200° C to 200° C, of 1×1014 Ωcm to 1×1016 Ωcm.
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Citations
12 Claims
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1. An electrostatic chuck comprising:
- a first insulating member whose one principal plane serves as a mounting surface on which a plate specimen is mounted;
a second insulating member, which is positioned facing an other principal plane of said first insulating member; and
an internal electrode located between said first insulating member and said second insulating member, whereinsaid first insulating member is formed from a composite ceramic having as its main constituents 1 wt % to 4 wt % of silicon carbide, and aluminum oxide, with a volume resistivity value in a temperature range of −
200°
C. to 200°
C., of 1×
1014 Ω
cm to 1×
1016 Ω
cm. - View Dependent Claims (2, 3, 4)
- a first insulating member whose one principal plane serves as a mounting surface on which a plate specimen is mounted;
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5. An electrostatic chuck comprising:
- a first insulating member whose one principal plane serves as a mounting surface on which a plate specimen is mounted;
a second insulating member, which is positioned facing an other principal plane of said first insulating member; and
an internal electrode located between said first insulating member and said second insulating member, whereinsaid first insulating member is formed from a composite ceramic having as its main constituents silicon carbide, on the surface of which an insulating material is formed, and aluminum oxide, with a volume resistivity value in a temperature range of −
200°
C. to 200°
C., of 1×
1014 Ω
cm to 1×
1016 Ω
cm. - View Dependent Claims (6, 7, 8, 9, 10)
- a first insulating member whose one principal plane serves as a mounting surface on which a plate specimen is mounted;
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11. A manufacturing method for an electrostatic chuck comprising a first insulating member whose one principal plane serves as a mounting surface on which a plate specimen is mounted, a second insulating member, which is positioned facing an other principal plane of said insulating member, and an internal electrode located between said first insulating member and said second insulating member, wherein
a step for manufacturing said first insulating member, said second insulating member, or both, has a mixing step for weighing prescribed amounts of silicon carbide powder and aluminum oxide powder and mixing them using a high pressure homogenization method, and a pressurized calcination step for calcinating the obtained mixed powder under pressure to form a composite ceramic.
Specification