Systems and methods of manufacturing integrated photonic circuit devices
First Claim
1. A photonic crystal structure, comprising:
- a substrate having a surface characteristic; and
at least a first material disposed on the surface characteristic and conformally covering the surface.
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Abstract
The systems and methods of the present invention includes the manufacturing of integrated photonic circuit devices using deposition processes such as, for example, supercritical fluid deposition (SFD). The present invention further includes the coupling of photonic crystal structures and planar waveguides to provide high performance, low-cost and scalable photonic components.
Preferred embodiments of the methods in accordance with the present invention produce high quality metal, metal dioxide, polymers, semiconductor and metal alloy deposits of precisely tailored composition in the form of thin films, conformal coatings on topologically complex surfaces, uniform deposits within high aspect ratio features, and both continuous and discrete deposits within microporous supports.
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Citations
40 Claims
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1. A photonic crystal structure, comprising:
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a substrate having a surface characteristic; and
at least a first material disposed on the surface characteristic and conformally covering the surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An integrated waveguide device, comprising:
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a substrate having a first refractive index characteristic;
a first material disposed on the substrate having a second refractive index characteristic, and forming a waveguide layer; and
a second material disposed at least within the first material having a third refractive index characteristic wherein the third refractive index characteristic is greater than the first and second refractive index characteristics. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A photonic crystal filter, comprising:
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an input waveguide which carries a signal having at least one frequency including at least one desired frequency;
an output waveguide; and
a photonic crystal resonator system coupled between said input and output waveguides operable for the adjustable transfer of said at least one desired frequency to said output waveguide. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A photonic crystal wavelength router, comprising:
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at least a first input waveguide;
at least a first output waveguide;
a chromatic dispersion compensator;
at least one wavelength division multiplex filter; and
at least one photonic crystal reflector. - View Dependent Claims (30, 31, 32)
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33. A photonic crystal optical add/drop multiplexer, comprising:
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an input waveguide;
at least a first output waveguide;
an optical performance monitor coupled between the input waveguide and the at least first output waveguide;
a photonic crystal wavelength router; and
a dispersion compensation module.
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34. A photonic crystal dynamic optical add/drop multiplexer comprising:
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a plurality of input waveguides;
a plurality of output waveguides;
a plurality of photonic crystal resonator systems disposed between the plurality of input waveguides and plurality of output waveguides; and
a photonic crystal reflector coupled to the plurality of photonic crystal resonator systems.
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35. A method of producing an integrated photonic circuit device, comprising:
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providing a substrate with a surface characteristic and a first refractive index characteristic;
disposing at least a first material with a second refractive index characteristic onto the surface characteristic, wherein the second refractive index characteristic is higher than the first.
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36. The method of producing an integrated photonic circuit device of claim 36 further comprising:
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etching the surface characteristic of the substrate to form a plurality of cavities having an aspect ratio characteristic; and
depositing a second material having a third refractive index characteristic in the plurality of cavities, the third refractive index characteristic being higher than the first and the second refractive index characteristic.
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37. The method of producing an integrated photonic circuit device of claim 37 wherein the aspect ratio characteristic is approximately 30.
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38. A periodic three dimensional photonic crystal structure comprising:
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a substrate having a surface characteristic;
at least one thin film deposited on the surface characteristic to result in a multi-layer photonic crystal, the multi-layer photonic crystal being adapted to have an induced variation in an index of refraction characteristic and wherein a plurality of the multi-layer photonic crystals are placed in a stack configuration and a material is deposited into interstitial gaps formed in the stack configuration using supercritical fluid deposition processes. - View Dependent Claims (39)
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40. An optical waveguide structure, comprising;
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a first waveguide;
a second waveguide that intersects with said first waveguide; and
at least one photonic crystal resonator at the intersection of said first and second waveguides to minimize cross talk between signals of said first and second waveguides.
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Specification