Fluid diverter apparatus and method

• US 20030127135A1
• Filed: 01/07/2002
• Published: 07/10/2003
• Est. Priority Date: 01/07/2002
• Status: Abandoned Application

• Current Assignee: Acilis Technologies, LLC
• Original Assignee: Acilis Technologies, LLC
• Inventors: Gremillion, Dale Lee, Jenkins, Glen Duane
• Application Number:
  US10/041,222
• Publication Number:
  US 20030127135A1
• Time in Patent Office: Days
• US Class Current: 137/312
• CPC Class Codes: B01J 4/02 for feeding measured , i.e. prescribed quantities of reagents
• CPC Class Codes: B24B 37/04 designed for working plane surfaces
• CPC Class Codes: B24B 55/03 designed as a complete equipment for feeding or clarifying coolant
• CPC Class Codes: B24B 57/00 Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for abrasive blasting B24C1/00, B24C7/00
• CPC Class Codes: Y10T 137/5762 With leakage or drip collecting

Abstract

A fluid diverter apparatus and method includes, in a processing system utilizing multiple fluids, a containment enclosure. A first drain connects the processing system with the containment enclosure. A remotely manipulable diverter is connected to the first drain inside the containment enclosure. A second drain is connected to the diverter on one end and to a first recovery system outside of the containment enclosure on the other end. A third drain is connected to the diverter on one end and to a second recovery system outside of the containment enclosure on the other end.

Claims

1. In a processing system utilizing multiple fluids, a fluid diverter apparatus, the apparatus comprising:

a) a containment enclosure;

b) a first drain from said processing system connected to said containment enclosure;

c) a remotely manipulable diverter connected to said first drain inside said containment enclosure;

d) a second drain connected to said diverter on one end and to a first recovery system outside of said containment enclosure on another end; and

e) a third drain connected to said diverter on one end and to a second recovery system outside of said containment enclosure on another end.

2. The apparatus of claim 1 further comprising a signal receiver-sender connected to said diverter for receiving a first signal from said processing system and sending a second signal to said diverter for manipulation thereof.

3. The apparatus of claim 1 further comprising an overflow line connected to said first drain inside said containment enclosure and to said third drain inside said containment enclosure.

4. The apparatus of claim 1 further comprising a leak detector inside said containment enclosure.

5. The apparatus of claim 4 wherein said leak detector is a float switch.

6. The apparatus of claim 3 further comprising an overflow sensor.

7. The apparatus of claim 2 wherein said first signal is selected from a group including electrical, mechanical and pneumatic signals.

8. The apparatus of claim 2 wherein said second signal is selected from a group including electrical, mechanical and pneumatic signals.

9. The apparatus of claim 2 wherein said first signal is generated by the processing system.

10. The apparatus of claim 2 wherein the first signal is generated by an auxiliary signal generator connected to said processing system.

11. The apparatus of claim 2 further comprising a programmable timer connected to said signal receiver-sender.

12. The apparatus of claim 2 wherein said diverter is open to said second fluid recovery system as a default position until said second signal is received.

13. The apparatus of claim 11 wherein said programmable timer receives said first signal and delays the sending of said second signal by a pre-programmed amount.

14. The apparatus of claim 1 wherein said first recovery system is a fluid reclaim system.

15. The apparatus of claim 1 wherein said second recovery system is a waste fluid system.

16. In a process tool utilizing at least two fluids with a process tool drain connected to the process tool for draining the fluids, a fluid diverter apparatus, the apparatus comprising:

a) a containment enclosure;

b) a first drain connected to the process tool drain and connected to the containment enclosure;

c) a two way diverter valve inside the containment enclosure connected to the first drain;

d) a second drain connected to the two way diverter valve and to a fluid reclaim system outside of the containment enclosure;

e) a third drain connected to the two way diverter valve and to a waste fluid system outside of the containment enclosure; and

f) a solenoid connected to the two way diverter valve for receiving a first signal from the process tool and for sending a second signal to the two way diverter valve for operation thereof.

17. The apparatus of claim 16 further comprising an overflow line connected to the first drain and to the third drain inside the containment enclosure.

18. The apparatus of claim 16 further comprising a leak detector inside the containment enclosure.

19. The apparatus of claim 16 wherein the first signal is generated by the process tool.

20. The apparatus of claim 16 wherein the first signal is generated by an auxiliary signal generator connected to the process tool.

21. The apparatus of claim 16 further comprising a programmable timer connected to the solenoid.

22. The apparatus of claim 16 wherein the two way diverter valve is open to the waste fluid drain as a default position until the second signal is received.

23. In a system in which a process tool utilizes more than one fluid and where a fluid drain is connected to the process tool for draining the fluids, a fluid diverting method, the method including the steps of:

a) providing a containment enclosure;

b) connecting a first drain to the process tool drain and to the containment enclosure;

c) providing a diverter valve inside the containment enclosure and connecting the diverter valve to the first drain;

d) connecting a second drain to the diverter valve and to a fluid reclaim system outside the containment enclosure;

e) connecting a third drain to the diverter valve and to a waste fluid system outside the containment enclosure;

f) connecting a solenoid to the diverter valve, the solenoid conformed to receive a first signal from the system and to send a second signal to the diverter valve for operation thereof;

g) operating the process tool, thereby generating fluid to be sent to the waste fluid system and also generating a first signal to the solenoid;

h) the solenoid generating a second signal and sending the second signal to the diverter valve so that the diverter valve is operated to send the fluid to the waste fluid system;

i) operating the process tool, thereby generating fluid to be sent to the fluid reclaim system and also generating a first signal to the solenoid; and

j) the solenoid generating a second signal and sending the second signal to the diverter valve so that the diverter valve is operated to send the fluid to the fluid reclaim system.