Tunable piezoelectric micro-mechanical resonator
First Claim
1. A composite member for a resonator, comprising:
- an active piezoelectric element for causing said resonator to vibrate and for detecting a frequency of said vibration; and
a passive piezoelectric element operable to change said frequency of said vibration.
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Abstract
One aspect of the invention relates to a composite member for a resonator having an active piezoelectric element and a passive piezoelectric element. The active piezoelectric element causes the resonator to vibrate and detects the frequency of the vibration. The passive piezoelectric element changes the frequency of the vibration. Another aspect of the invention relates to a method for controlling a resonator with composite member having a substrate carrying a composite piezoelectric element. The composite piezoelectric element includes an actuator element, a sensor element and a passive element. The method comprises inducing a resonance within the composite member with the actuator element, detecting the resonance with the sensor element, and altering the resonance by altering the electromechanical coupling of the passive element. Additional aspects and benefits of the invention are also given.
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Citations
45 Claims
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1. A composite member for a resonator, comprising:
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an active piezoelectric element for causing said resonator to vibrate and for detecting a frequency of said vibration; and
a passive piezoelectric element operable to change said frequency of said vibration. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A piezoelectric resonator, comprising:
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a substrate;
a first electrode carried by said substrate;
a composite piezoelectric element carried by said first electrode, said composite piezoelectric element further comprising;
an actuator element;
a sensor element; and
a passive element;
a second electrode carried by said composite piezoelectric element;
an excitation circuit operable to supply a control signal to said actuator element and operable to receive a feedback signal from said sensor element; and
a tuning circuit operable to alter the electromechanical coupling of said passive element. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A tunable piezoelectric micro-mechanical resonator, comprising:
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a composite member, said composite member being comprised of;
a piezoelectric actuator element;
a piezoelectric sensor element;
a piezoelectric passive element; and
a substrate carrying said piezoelectric actuator element, said piezoelectric sensor element, and said piezoelectric passive element;
an excitation circuit operable to induce a resonance at a frequency within said composite member and operable to receive a feedback signal from said composite member; and
a tuning circuit connected to said piezoelectric passive element and operable to vary said frequency. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. A method for controlling a resonator having composite member, said composite member having a substrate carrying a composite piezoelectric element, wherein said composite piezoelectric element includes an actuator element, a sensor element and a passive element, the method comprising:
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inducing a resonance within said composite member with said actuator element;
detecting said resonance with said sensor element; and
altering said resonance by altering the electromechanical coupling of said passive element. - View Dependent Claims (38, 39, 40, 41)
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42. A method for tuning a resonator operating at one of a plurality of frequency modes, said resonator being comprised of a composite member having a substrate carrying a piezoelectric element, said piezoelectric element including an actuator element, a sensor element and a passive element, the method comprising:
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inducing a vibration at a single frequency within said composite member with said actuator element;
detecting said frequency with said sensor element; and
adjusting said frequency with said passive element. - View Dependent Claims (43, 44, 45)
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Specification