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Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers

  • US 20030128081A1
  • Filed: 01/09/2002
  • Published: 07/10/2003
  • Est. Priority Date: 01/09/2002
  • Status: Active Grant
First Claim
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1. A bulk acoustic wave device having a resonant frequency and an acoustic wavelength characteristic of the resonant frequency, said device comprising:

  • a first resonator having a first electrode, a second electrode and a first piezoelectric layer disposed between the first and second electrodes;

    a second resonator having a third electrode, a fourth electrode and a second piezoelectric layer disposed between the third and fourth electrodes; and

    an electrically insulating layer, wherein the first resonator and the second resonator are arranged in a stack with the electrically insulating layer disposed between the second electrode and the third electrode.

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