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Dielectric structure

  • US 20030128496A1
  • Filed: 10/10/2002
  • Published: 07/10/2003
  • Est. Priority Date: 11/26/2001
  • Status: Active Grant
First Claim
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1. A capacitor structure comprising a first conductive layer, a second conductive layer and a multilayer dielectric structure disposed between the first and second conductive layers, wherein the multilayer dielectric structure comprises a first dielectric layer and a second dielectric layer, wherein the first dielectric layer has a textured surface.

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