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Showerhead assembly for a processing chamber

  • US 20030132319A1
  • Filed: 01/15/2002
  • Published: 07/17/2003
  • Est. Priority Date: 01/15/2002
  • Status: Active Grant
First Claim
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1. A showerhead assembly for distributing gases within a processing chamber, comprising:

  • a cylindrical member having an outwardly extending first flange at a first end; and

    a disk having a plurality of holes formed though a center region of the disk, the disk coupled to the cylindrical member at a second end in a manner that permits relative movement therebetween.

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