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Ceramic substrate support

  • US 20030136520A1
  • Filed: 01/22/2002
  • Published: 07/24/2003
  • Est. Priority Date: 01/22/2002
  • Status: Active Grant
First Claim
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22. A support assembly for supporting a workpiece comprising:

  • a ceramic body having a first side and a second side adapted to support the workpiece;

    a passage formed through the ceramic body having both a first end and a second end in fluid communication with the second side of the ceramic body;

    a heating element disposed in the ceramic body;

    a plate coupled to the ceramic body; and

    a channel defined between the first side of the ceramic body and a first side of the plate, the channel in fluid communication with the second end of the passage.

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