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Imaging apparatus and method

  • US 20030149346A1
  • Filed: 11/25/2002
  • Published: 08/07/2003
  • Est. Priority Date: 03/03/2000
  • Status: Active Grant
First Claim
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1. A method of investigating a sample, the method comprising the steps of:

  • irradiating a surface of a sample with a pulse of electromagnetic radiation, said pulse having a plurality of frequencies in the range from 25 GHz to 100 THz;

    detecting said radiation reflected from the sample and deriving structural information about the sample as a function of depth from the surface of the sample.

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