Imaging apparatus and method
First Claim
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1. A method of investigating a sample, the method comprising the steps of:
- irradiating a surface of a sample with a pulse of electromagnetic radiation, said pulse having a plurality of frequencies in the range from 25 GHz to 100 THz;
detecting said radiation reflected from the sample and deriving structural information about the sample as a function of depth from the surface of the sample.
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Abstract
A range of technique for investigating a sample such as obtaining images and/or spectral information are described. The techniques include a method for deriving structural information about a sample as a continuous function of the depth below the surface of the sample, a method for evaluating a part of the structure of a sample located between two interfaces within the sample, and a contrast enhancing method and apparatus which has a quick image acquisition time.
132 Citations
21 Claims
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1. A method of investigating a sample, the method comprising the steps of:
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irradiating a surface of a sample with a pulse of electromagnetic radiation, said pulse having a plurality of frequencies in the range from 25 GHz to 100 THz;
detecting said radiation reflected from the sample and deriving structural information about the sample as a function of depth from the surface of the sample. - View Dependent Claims (2, 3, 4, 5)
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6. An apparatus for investigating a sample, the apparatus comprising:
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means for irradiating a surface of a sample with pulse of electromagnetic radiation, said pulse having a plurality of frequencies in the range from 25 GHz to 100 THz;
means for detecting said radiation reflected from the sample and deriving structural information about the sample as a function of depth from the surface of the sample, means
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7. A method of imaging a sample, the method comprising the steps of:
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irradiating a sample with a pulse of electromagnetic radiation, said pulse having a plurality of frequencies in the range from 25 GHz to 100 THz;
detecting the amplitude of the radiation reflected from or transmitted by the sample; and
generating an image of sample using the amplitude of the radiation detected at a single point in time. - View Dependent Claims (8, 9, 10, 11)
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12. An apparatus for generating an image of a sample, the apparatus comprising:
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means for irradiating a sample with a pulse of electromagnetic radiation, said pulse having a plurality of frequencies in the range from 25 GHz to 100 THz;
means for detecting the amplitude of the radiation reflected from or transmitted by the sample; and
means for generating an image of sample using the amplitude of the radiation detected at a single point in time. - View Dependent Claims (13)
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14. A method of detecting variation in the composition of a sample, the variations being located between a first and second interfaces of the sample, the method comprising the steps of:
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irradiating a first part and a second part of a surface of the sample with electromagnetic radiation, the first interface being located closer to the surface than the second interface;
detecting the signal due to reflection of the radiation from the first and second interfaces of the two parts of the sample;
comparing the peak height of the signal from the second interface with that of the first interface in the same part of the sample to produce a corrected second interface signal and comparing the corrected second interface signals. - View Dependent Claims (15, 16, 17, 18)
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19. An apparatus for detecting variation in the composition of a sample, the variations being located between a first and second interfaces of the sample, the apparatus comprising:
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means for irradiating a first part and a second part of a surface of the sample with electromagnetic radiation, the first interface being located closer to the surface than the second interface;
means for detecting the signal due to reflection of the radiation from the first and second interfaces of the two parts of the sample;
means for comparing the peak height of the signal from the second interface with that of the first interface in the same part of the sample to produce a corrected second interface signal and comparing the corrected second interface signals for the different parts of the sample.
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20. A method as substantially hereinbefore described with reference to the accompanying drawings.
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21. An apparatus as substantially hereinbefore described with reference to any of the accompanying figures.
Specification