System and method for reducing electric discharge breakdown in electrostatically levitated MEMS devices

• US 20030150268A1
• Filed: 02/08/2002
• Published: 08/14/2003
• Est. Priority Date: 02/08/2002
• Status: Abandoned Application

• Current Assignee: Ball Semiconductor, Inc.
• Original Assignee: Ball Semiconductor, Inc.
• Inventors: Takeda, Nobuo, Toda, Risaku
• Application Number:
  US10/071,149
• Publication Number:
  US 20030150268A1
• Time in Patent Office: Days
• US Class Current: 73/514.18
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means

Abstract

A system and method for reducing electric discharge breakdown occurrences in a micro-electromechanical system device is provided. The device comprises a core, a shell, and electrodes, which may be formed on the shell. When voltage is applied to the electrodes, each electrode applies an electrostatic force on the core. The electrodes are arranged in concentric sets, where each set may comprises two or more electrodes. Due to the concentricity of the electrodes, a minimum distance is maintained between the core and an outer electrode of an electrode set when the core nears or touches an inner electrode of the electrode set.

Claims

1. A micro-electromechanical system device, the device comprising:

a core;

a shell surrounding at least a portion of the core; and

a first electrode and a second electrode positioned proximate to the shell and operable to exert an electrostatic force on the core, the first and second electrodes being arranged concentrically with respect to one another, so that the occurrence of electric discharge breakdowns is reduced.

2. The device of claim 1 wherein the electrodes are circular.

3. The device of claim 1 wherein the core and the shell are spherical.

4. The device of claim 1 wherein the device is an accelerometer.

5. The device of claim 1 wherein the core comprises a dielectric material.

6. The device of claim 1 wherein the core and the shell are sized relative to each other so that, if the core touches the first electrode, a minimum distance will be maintained between the second electrode and the core, the minimum distance aiding in the reduction of electric discharge breakdowns.

7. The device of claim 1 further including a control means, the control means operable to sense changes in a position of the core relative to the shell and to alter a voltage in at least one of the first and second electrodes to maintain the position of the core relative to the shell.

8. A micro-electromechanical system, the system comprising:

a spherical core;

a spherical shell surrounding the core; and

a first electrode and a second electrode positioned proximate to the interior of the shell, the first and second electrodes being concentrically arranged, so that electric discharge breakdown occurrences are minimized when an electrostatic force is exerted on the core.

9. The system of claim 8 wherein the first and second electrodes are circular.

10. The system of claim 8 wherein the first and second electrodes exert a capacitive force on the core.

11. The system of claim 8 wherein the first and second electrodes are charged using voltages of opposite polarity.

12. The system of claim 8 further including a third electrode and a fourth electrode, the third and fourth electrodes being positioned proximate to the shell at a location opposite to that of the first and second electrodes.

13. The system of claim 12 further including a control means, the control means operable to sense changes in a position of the core relative to the shell and to alter a voltage supplied to at least one of the first, second, third, or fourth electrodes to maintain the position of the core relative to the shell.

14. The system of claim 8 wherein the core is dielectric.

15. The system of claim 8 wherein the core and the shell are sized relative to each other so that, if the core touches the first electrode, a minimum distance will be maintained between the second electrode and the core, the minimum distance aiding in the reduction of electric discharge breakdowns.

16. A method for reducing the occurrence of electric discharge breakdowns in a micro-electromechanical system comprising a core and a shell, the method comprising:

creating at least a first electrical path and a second electrical path on the shell; and

creating a first electrode and a second electrode on the shell, the first and second electrodes sharing a common center point and accessible to the first and second electrical paths, respectively;

so that power can be provided to the first and second electrodes, the power enabling the first and second electrodes to exert an electrostatic force on the core.

17. The method of claim 16 further including providing a third electrode and a fourth electrode, the third and fourth electrodes concentrically arranged and operable to offset the electrostatic force exerted by the first and second electrodes.

18. The method of claim 17 further including sensing a change in a position of the core relative to the shell and altering the voltage in at least one of the first, second, third, or fourth electrodes to maintain the position of the core relative to the shell in response to the sensed change.