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Method for fabricating a structure for a microelectromechanical systems (MEMS) device

  • US 20030152872A1
  • Filed: 02/12/2002
  • Published: 08/14/2003
  • Est. Priority Date: 02/12/2002
  • Status: Active Grant
First Claim
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1. A microfabrication process for fabricating a microelectromechanical systems device, comprising:

  • depositing one or a stack of layers on a substrate;

    patterning said one or a stack of layers;

    depositing a middle layer on said one or a stack of layers; and

    patterning the middle layer using said one or a stack of layers as a photomask.

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