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Novel method for forming polymer pattern

  • US 20030153006A1
  • Filed: 11/19/2002
  • Published: 08/14/2003
  • Est. Priority Date: 05/22/2000
  • Status: Abandoned Application
First Claim
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1. A method for forming a combinatorial polymer pattern whereby different polymers synthesized with a plurality of monomer types in various sequences are immobilized on a wafer in a specific pattern, the method comprising the steps of:

  • (1) preparing a plurality of reactors each containing a different monomer, a particle transfer control device for controlling transfer of particles between the reactors and a device for arranging the particles on a wafer, (2) controlling the transport of the particles as carriers by said particle transfer control device for their immersion in the reactors according to a predetermined order, to synthesize polymers having predetermined sequences on the carrier particle surfaces, and (3) arranging the particles obtained in step (2) on a wafer to form a pattern of polymers having various sequences on said wafer.

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